| Presentation | 2013-05-17 High speed response of a Si avalanche photodiode fabricated by 0.18μm standard CMOS process Toshiyuki SHIMOTORI, Ryoichi GYOBU, Takeo MARUYAMA, Koich IIYAMA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Si avalanche photodiodes (APDs) with different electrode spacing are fabricated by 0.18μm standard CMOS process, and their frequency response are measured at 0.8μm wavelength region. The structure of the device is based on the n-MOSFET on a p-substrate, and a p-well layer is used as an optical absorption layer, and the structure to cancel the photogenerated carriers generated in the p-substrate are introduced for fast response. For the APD with the electrode spacing of 1μm, the maximum bandwidth of 7 GHz and the gain bandwidth product of 270 GHz are achieved. The capacitance of the APD is measured to be 443 fF, and the corresponding CR-limited bandwidth with 500Ω load is estimated to be 7.2 GHz, showing the response speed is limited by the CR-limited bandwidth. Since the PAD capacitance is included in the measured capacitance, the capacitance can be decreased and the bandwidth may be increased resultantly with decreasing the PAD size. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Si / Avalanche photodiode / standard CMOS process / High speed response |
| Paper # | LQE2013-16 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2013/5/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High speed response of a Si avalanche photodiode fabricated by 0.18μm standard CMOS process |
| Sub Title (in English) | |
| Keyword(1) | Si |
| Keyword(2) | Avalanche photodiode |
| Keyword(3) | standard CMOS process |
| Keyword(4) | High speed response |
| 1st Author's Name | Toshiyuki SHIMOTORI |
| 1st Author's Affiliation | Kanazawa University Graduate School of Natural Science & Technology() |
| 2nd Author's Name | Ryoichi GYOBU |
| 2nd Author's Affiliation | Kanazawa University Graduate School of Natural Science & Technology |
| 3rd Author's Name | Takeo MARUYAMA |
| 3rd Author's Affiliation | Kanazawa University Graduate School of Natural Science & Technology |
| 4th Author's Name | Koich IIYAMA |
| 4th Author's Affiliation | Kanazawa University Graduate School of Natural Science & Technology |
| Date | 2013-05-17 |
| Paper # | LQE2013-16 |
| Volume (vol) | vol.113 |
| Number (no) | 49 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |