| Presentation | 2013-05-17 Label-free Fabry-Perot Interferometric Biosensor using CMOS Image Sensor Technology Ryo OZAWA, Kazuhiro TAKAHASHI, Hiroki OYAMA, Masato FUTAGAWA, Fumihiro DASAI, Makoto ISHIDA, Kazuaki SAWADA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a CMOS-MEMS-based label-free protein sensor, which utilizes optical transmittance change by the Fabry-Perot interference to enhance the sensitivity of surface-stress. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1μN/m which is two orders of magnitude above the peizoresistive type. A read-out tiny photocurrent from the multidimensional arrayed MEMS sensor is signal-processed by integrated source follower circuit, selector, and decoder. We successfully demonstrated the MOSFET and MEMS sensor, and established the heterogeneous integration process. The integrated MEMS sensor array can be used for screening analysis for any cancers. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / biosensor / Fabry-Perot interferometer / label-free / surface stress / CMOS image sensor |
| Paper # | ED2013-31,CPM2013-16,SDM2013-38 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2013/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Label-free Fabry-Perot Interferometric Biosensor using CMOS Image Sensor Technology |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | biosensor |
| Keyword(3) | Fabry-Perot interferometer |
| Keyword(4) | label-free |
| Keyword(5) | surface stress |
| Keyword(6) | CMOS image sensor |
| 1st Author's Name | Ryo OZAWA |
| 1st Author's Affiliation | Electrical and Electronic Information Engineering, Toyohashi University of Technology() |
| 2nd Author's Name | Kazuhiro TAKAHASHI |
| 2nd Author's Affiliation | Electrical and Electronic Information Engineering, Toyohashi University of Technology:EIIRIS, Toyohashi University of Technology |
| 3rd Author's Name | Hiroki OYAMA |
| 3rd Author's Affiliation | Electrical and Electronic Information Engineering, Toyohashi University of Technology |
| 4th Author's Name | Masato FUTAGAWA |
| 4th Author's Affiliation | EIIRIS, Toyohashi University of Technology |
| 5th Author's Name | Fumihiro DASAI |
| 5th Author's Affiliation | Electrical and Electronic Information Engineering, Toyohashi University of Technology |
| 6th Author's Name | Makoto ISHIDA |
| 6th Author's Affiliation | Electrical and Electronic Information Engineering, Toyohashi University of Technology:JST-CREST |
| 7th Author's Name | Kazuaki SAWADA |
| 7th Author's Affiliation | Electrical and Electronic Information Engineering, Toyohashi University of Technology:EIIRIS, Toyohashi University of Technology:JST-CREST |
| Date | 2013-05-17 |
| Paper # | ED2013-31,CPM2013-16,SDM2013-38 |
| Volume (vol) | vol.113 |
| Number (no) | 40 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |