Presentation 2012-11-30
Development of Ge Light Emitter for Monolithic Light Source
Kazuki TANI, Shin-ichi SAITO, Katsuya ODA, Tadashi OKUMURA, Toshiyuki MINE, Tatemi IDO,
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Abstract(in English) For the purpose of realization of monolithic light sources on a silicon chip, Ge epitaxial growth technique was investigated, and a Ge light emitting diode, which consists of a Ge waveguide grown on a pn diode fabricated on SOI (silicon-on-insulator) layer, was fabricated. A post annealing after low temperature epitaxial growth of Ge layer effectively improved the crystallinity and light emitting properties of Ge, and fabricated devices showed good electrical and luminous properties.
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Keyword(in English) Silicon photonics / Ge / Light emitting diode
Paper # ED2012-91,CPM2012-148,LQE2012-119
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Conference Information
Committee LQE
Conference Date 2012/11/22(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Development of Ge Light Emitter for Monolithic Light Source
Sub Title (in English)
Keyword(1) Silicon photonics
Keyword(2) Ge
Keyword(3) Light emitting diode
1st Author's Name Kazuki TANI
1st Author's Affiliation Photonics Electronics Technology Research Association (PETRA):Institute for Photonics-Electronics Convergence System Technology (PECST):Hitachi, Ltd., Central Research Laboratory()
2nd Author's Name Shin-ichi SAITO
2nd Author's Affiliation Photonics Electronics Technology Research Association (PETRA):Institute for Photonics-Electronics Convergence System Technology (PECST):Hitachi, Ltd., Central Research Laboratory
3rd Author's Name Katsuya ODA
3rd Author's Affiliation Photonics Electronics Technology Research Association (PETRA):Institute for Photonics-Electronics Convergence System Technology (PECST):Hitachi, Ltd., Central Research Laboratory
4th Author's Name Tadashi OKUMURA
4th Author's Affiliation Hitachi, Ltd., Central Research Laboratory
5th Author's Name Toshiyuki MINE
5th Author's Affiliation Hitachi, Ltd., Central Research Laboratory
6th Author's Name Tatemi IDO
6th Author's Affiliation Photonics Electronics Technology Research Association (PETRA):Institute for Photonics-Electronics Convergence System Technology (PECST):Hitachi, Ltd., Central Research Laboratory
Date 2012-11-30
Paper # ED2012-91,CPM2012-148,LQE2012-119
Volume (vol) vol.112
Number (no) 329
Page pp.pp.-
#Pages 4
Date of Issue