Presentation | 2012-11-30 RF-MBE growth of InGaN-based quantum nanostructures using DERI Tsutomu ARAKI, Nao UEMATSU, Junichi SAKAGUCHI, Ke WANG, Tomohiro YAMAGUCHI, Euijoon Yoon, Yasushi NANISHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We successfully demonstrated fabrication of InN/In_<0.7>Ga_<0.3>N and In_<0.2>Ga_<0.8>N/In_<0.3>Ga_<0.7>N multi quantum well (MQW) structures using droplet elimination by radical-beam irradiation (DERI) method. First, InGaN was grown under a metal rich condition by supplying Ga, In and N* simultaneously, in which In was preferentially swept out to the surface. Second, the swept In on the InGaN was transformed to InN by N* irradiation. Thus, by simply repeating these processes InN/In_<0.7>Ga_<0.3>N MQW structure was fabricated. On the other hand, by supplying Ga and N* with different plasma power, In_<0.2>Ga_<0.8>N/In_<0.3>Ga_<0.7>N MQW structure was similarly fabricated. TEM and XRD studies confirmed that these InGaN-based MQW structures had uniform periodic structures. Strong PL peaks at IR and green regions were also observed respectively. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | DERI / InN / InGaN / crystal growth / MBE / multi quantum well structure |
Paper # | ED2012-78,CPM2012-135,LQE2012-106 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2012/11/22(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | RF-MBE growth of InGaN-based quantum nanostructures using DERI |
Sub Title (in English) | |
Keyword(1) | DERI |
Keyword(2) | InN |
Keyword(3) | InGaN |
Keyword(4) | crystal growth |
Keyword(5) | MBE |
Keyword(6) | multi quantum well structure |
1st Author's Name | Tsutomu ARAKI |
1st Author's Affiliation | College of Science and Engineering, Ritsumeikan University() |
2nd Author's Name | Nao UEMATSU |
2nd Author's Affiliation | College of Science and Engineering, Ritsumeikan University |
3rd Author's Name | Junichi SAKAGUCHI |
3rd Author's Affiliation | College of Science and Engineering, Ritsumeikan University |
4th Author's Name | Ke WANG |
4th Author's Affiliation | R-GIRO, Ritsumeikan University |
5th Author's Name | Tomohiro YAMAGUCHI |
5th Author's Affiliation | College of Engineering, Kogakuin University |
6th Author's Name | Euijoon Yoon |
6th Author's Affiliation | WCU Program, Seoul National University |
7th Author's Name | Yasushi NANISHI |
7th Author's Affiliation | R-GIRO, Ritsumeikan University:WCU Program, Seoul National University |
Date | 2012-11-30 |
Paper # | ED2012-78,CPM2012-135,LQE2012-106 |
Volume (vol) | vol.112 |
Number (no) | 329 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |