| Presentation | 2012-11-30 Study on inductively-coupled-plasma-dry-etching-mask for AlGaAs photonic crystal fabrication Yuji TOGANO, Yuta KITABAYASHI, Fumitaro ISHIKAWA, Masahiko KONDOW, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We investigate inductively coupled plasma etching mask of Al-rich AlGaAs for photonic crystal (PC) fabrication. This study examined advantage of Si_3N_4 mask in comparison with SiO_2 mask used conventionally. It was found that the oxygen which comes from SiO_2 mask hardly affects the Al oxide deposits. It was also found that Si_3N_4 mask is higher in tolerance than SiO_2 mask. Si_3N_4 mask is promising under wider condition on etching. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Inductively coupled plasma etching / Al-rich AlGaAs / Photonic crystal |
| Paper # | ED2012-90,CPM2012-147,LQE2012-118 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2012/11/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on inductively-coupled-plasma-dry-etching-mask for AlGaAs photonic crystal fabrication |
| Sub Title (in English) | |
| Keyword(1) | Inductively coupled plasma etching |
| Keyword(2) | Al-rich AlGaAs |
| Keyword(3) | Photonic crystal |
| 1st Author's Name | Yuji TOGANO |
| 1st Author's Affiliation | Department of Quantum Electronic Device Engineering, Graduate School of Engineering, Osaka University() |
| 2nd Author's Name | Yuta KITABAYASHI |
| 2nd Author's Affiliation | Department of Quantum Electronic Device Engineering, Graduate School of Engineering, Osaka University |
| 3rd Author's Name | Fumitaro ISHIKAWA |
| 3rd Author's Affiliation | Department of Quantum Electronic Device Engineering, Graduate School of Engineering, Osaka University |
| 4th Author's Name | Masahiko KONDOW |
| 4th Author's Affiliation | Department of Quantum Electronic Device Engineering, Graduate School of Engineering, Osaka University |
| Date | 2012-11-30 |
| Paper # | ED2012-90,CPM2012-147,LQE2012-118 |
| Volume (vol) | vol.112 |
| Number (no) | 327 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |