| Presentation | 2012-11-30 Fabrication of moth-eye patterned sapphire substrate (MPSS) and its application to LEDs Takayoshi Tsuchiya, Shinya Umeda, Mihoko Sowa, Toshiyuki Kondo, Tsukasa Kitano, Midori Mori, Atsushi Suzuki, Koichi Naniwae, Hitoshi Sekine, Motoaki Iwaya, Tetsuya Takeuchi, Satoshi Kamiyama, Isamu Akasaki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Fabrication processes of a moth-eye patterned sapphire substrate (MPSS), which can enhance a light extraction efficiency of nitride-based light emitting diodes (LEDs) have been examined. Optimization of structural parameters of MPSS for high-quality GaN growth was also performed. Then, we fabricated MPSS samples with a fixed pitch 460nm, and a height of corns of 250, 300 and 350nm. Light extraction efficiency of blue-LEDs growth on a series of MPSS was enhanced 1.4 times as compared with the devices grown on a flat sapphire substrate, while there is no dependence of height of corns on LED performance. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PSS / Moth-eye / UV-nanoimprinting technique / dry etching / LEDs |
| Paper # | ED2012-82,CPM2012-139,LQE2012-110 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2012/11/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of moth-eye patterned sapphire substrate (MPSS) and its application to LEDs |
| Sub Title (in English) | |
| Keyword(1) | PSS |
| Keyword(2) | Moth-eye |
| Keyword(3) | UV-nanoimprinting technique |
| Keyword(4) | dry etching |
| Keyword(5) | LEDs |
| 1st Author's Name | Takayoshi Tsuchiya |
| 1st Author's Affiliation | Faculty of Science and Technology, Meijo University() |
| 2nd Author's Name | Shinya Umeda |
| 2nd Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 3rd Author's Name | Mihoko Sowa |
| 3rd Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 4th Author's Name | Toshiyuki Kondo |
| 4th Author's Affiliation | EL-SEED, Corp. |
| 5th Author's Name | Tsukasa Kitano |
| 5th Author's Affiliation | EL-SEED, Corp. |
| 6th Author's Name | Midori Mori |
| 6th Author's Affiliation | EL-SEED, Corp. |
| 7th Author's Name | Atsushi Suzuki |
| 7th Author's Affiliation | EL-SEED, Corp. |
| 8th Author's Name | Koichi Naniwae |
| 8th Author's Affiliation | EL-SEED, Corp. |
| 9th Author's Name | Hitoshi Sekine |
| 9th Author's Affiliation | DIC Corporation |
| 10th Author's Name | Motoaki Iwaya |
| 10th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 11th Author's Name | Tetsuya Takeuchi |
| 11th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 12th Author's Name | Satoshi Kamiyama |
| 12th Author's Affiliation | Faculty of Science and Technology, Meijo University:EL-SEED, Corp. |
| 13th Author's Name | Isamu Akasaki |
| 13th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| Date | 2012-11-30 |
| Paper # | ED2012-82,CPM2012-139,LQE2012-110 |
| Volume (vol) | vol.112 |
| Number (no) | 327 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |