| Presentation | 2012-11-30 RF-MBE growth of InGaN-based quantum nanostructures using DERI Tsutomu ARAKI, Nao UEMATSU, Junichi SAKAGUCHI, Ke WANG, Tomohiro YAMAGUCHI, Euijoon Yoon, Yasushi NANISHI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We successfully demonstrated fabrication of InN/In_<0.7>Ga_<0.3>N and In_<0.2>Ga_<0.8>N/In_<0.3>Ga_<0.7>N multi quantum well (MQW) structures using droplet elimination by radical-beam irradiation (DERI) method. First, InGaN was grown under a metal rich condition by supplying Ga, In and N^* simultaneously, in which In was preferentially swept out to the surface. Second, the swept In on the InGaN was transformed to InN by N^* irradiation. Thus, by simply repeating these processes InN/In_<0.7>Ga_<0.3>N MQW structure was fabricated. On the other hand, by supplying Ga and N^* with different plasma power, In_<0.2>Ga_<0.8>N/In_<0.3>Ga_<0.7>N MQW structure was similarly fabricated. TEM and XRD studies confirmed that these InGaN-based MQW structures had uniform periodic structures. Strong PL peaks at IR and green regions were also observed respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | DERI / InN / InGaN / crystal growth / MBE / multi quantum well structure |
| Paper # | ED2012-78,CPM2012-135,LQE2012-106 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2012/11/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | RF-MBE growth of InGaN-based quantum nanostructures using DERI |
| Sub Title (in English) | |
| Keyword(1) | DERI |
| Keyword(2) | InN |
| Keyword(3) | InGaN |
| Keyword(4) | crystal growth |
| Keyword(5) | MBE |
| Keyword(6) | multi quantum well structure |
| 1st Author's Name | Tsutomu ARAKI |
| 1st Author's Affiliation | College of Science and Engineering, Ritsumeikan University() |
| 2nd Author's Name | Nao UEMATSU |
| 2nd Author's Affiliation | College of Science and Engineering, Ritsumeikan University |
| 3rd Author's Name | Junichi SAKAGUCHI |
| 3rd Author's Affiliation | College of Science and Engineering, Ritsumeikan University |
| 4th Author's Name | Ke WANG |
| 4th Author's Affiliation | R-GIRO, Ritsumeikan University |
| 5th Author's Name | Tomohiro YAMAGUCHI |
| 5th Author's Affiliation | College of Engineering, Kogakuin University |
| 6th Author's Name | Euijoon Yoon |
| 6th Author's Affiliation | WCU Program, Seoul National University |
| 7th Author's Name | Yasushi NANISHI |
| 7th Author's Affiliation | R-GIRO, Ritsumeikan University:WCU Program, Seoul National University |
| Date | 2012-11-30 |
| Paper # | ED2012-78,CPM2012-135,LQE2012-106 |
| Volume (vol) | vol.112 |
| Number (no) | 327 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |