| Presentation | 2012-11-30 Selective MOVPE growth on nonpolar GaN substrates D. JINNO, S. OKADA, H. MIYAKE, K. HIRAMATSU, Y. ENATSU, S. NAGAO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The selective-area growth (SAG) on nonpolar (10-10)(20-21)(20-2-1) GaN substrates by MOVPE was demonstrated, and the facet structures were investigated. The different structures depending on the SiO_2-mask stripe directions were observed. Anisotropic structures with (000-1) and (10-11) facets were obtained for all of the nonpolar GaN substrates along the [-12-10] direction. On the other hand, {11-20} and (20-2-1) facets appeared for SAG on the (20-21) GaN and (20-2-1) GaN substrates with SiO_2 mask along the [-1014] and [10-14] directions, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | nonpolar / GaN / MOVPE / selective area growth / facet |
| Paper # | ED2012-77,CPM2012-134,LQE2012-105 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2012/11/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Selective MOVPE growth on nonpolar GaN substrates |
| Sub Title (in English) | |
| Keyword(1) | nonpolar |
| Keyword(2) | GaN |
| Keyword(3) | MOVPE |
| Keyword(4) | selective area growth |
| Keyword(5) | facet |
| 1st Author's Name | D. JINNO |
| 1st Author's Affiliation | Mie University() |
| 2nd Author's Name | S. OKADA |
| 2nd Author's Affiliation | Mie University |
| 3rd Author's Name | H. MIYAKE |
| 3rd Author's Affiliation | Mie University |
| 4th Author's Name | K. HIRAMATSU |
| 4th Author's Affiliation | Mie University |
| 5th Author's Name | Y. ENATSU |
| 5th Author's Affiliation | Mitsubishi Chemical Corporation |
| 6th Author's Name | S. NAGAO |
| 6th Author's Affiliation | Mitsubishi Chemical Group Science and Technology Research Center Inc. |
| Date | 2012-11-30 |
| Paper # | ED2012-77,CPM2012-134,LQE2012-105 |
| Volume (vol) | vol.112 |
| Number (no) | 327 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |