Presentation 2012-11-29
Layered boron nitride as a release layer for mechanical transfer of GaN-based devices
Yasuyuki KOBAYASHI, Kazuhide KUMAKURA, Tetsuya AKASAKA, Hideki YAMAMOTO, Toshiki MAKIMOTO,
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Abstract(in English)
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Keyword(in English) Nitride Semiconductors / Hexagonal Boron Nitride / Mechanical Transfer
Paper # ED2012-66,CPM2012-123,LQE2012-94
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Committee ED
Conference Date 2012/11/22(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Layered boron nitride as a release layer for mechanical transfer of GaN-based devices
Sub Title (in English)
Keyword(1) Nitride Semiconductors
Keyword(2) Hexagonal Boron Nitride
Keyword(3) Mechanical Transfer
1st Author's Name Yasuyuki KOBAYASHI
1st Author's Affiliation NTT Basic Research Laboratories, NTT Corporation()
2nd Author's Name Kazuhide KUMAKURA
2nd Author's Affiliation NTT Basic Research Laboratories, NTT Corporation
3rd Author's Name Tetsuya AKASAKA
3rd Author's Affiliation NTT Basic Research Laboratories, NTT Corporation
4th Author's Name Hideki YAMAMOTO
4th Author's Affiliation NTT Basic Research Laboratories, NTT Corporation
5th Author's Name Toshiki MAKIMOTO
5th Author's Affiliation NTT Basic Research Laboratories, NTT Corporation
Date 2012-11-29
Paper # ED2012-66,CPM2012-123,LQE2012-94
Volume (vol) vol.112
Number (no) 327
Page pp.pp.-
#Pages 1
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