Presentation 2012-08-24
Monolithic Integration of a Silica AWG and Ge PDs on Si Photonic Platform for One-Chip WDM Receiver
Hidetaka NISHI, Tai TSUCHIZAWA, Rai KOU, Tatsuro HIRAKI, Hiroshi FUKUDA, Yasuhiko ISHIKAWA, Kazumi WADA, Koji YAMADA,
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Abstract(in English) Using low-temperature ECR PECVD technology, a silica-based AWG was monolithically integrated with germanium photodiodes on a Si photonic platform. We confirmed that the integrated AWG successfully demultiplex all of 16-wavelength channels and all of integrated GePDs received 1.25 Gbps PRBS signals with clear eye opening. In addition, we have mounted multi-channel transimpedance amplifiers and limiting amplifiers on the integrated photonic device using flip-chip bonding technology.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Si photonics / monolithic integration / ECR-CVD / WDM / AWG / Ge PD
Paper # R2012-43,EMD2012-49,CPM2012-74,OPE2012-81,LQE2012-47
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Committee EMD
Conference Date 2012/8/16(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Monolithic Integration of a Silica AWG and Ge PDs on Si Photonic Platform for One-Chip WDM Receiver
Sub Title (in English)
Keyword(1) Si photonics
Keyword(2) monolithic integration
Keyword(3) ECR-CVD
Keyword(4) WDM
Keyword(5) AWG
Keyword(6) Ge PD
1st Author's Name Hidetaka NISHI
1st Author's Affiliation NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp.()
2nd Author's Name Tai TSUCHIZAWA
2nd Author's Affiliation NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp.
3rd Author's Name Rai KOU
3rd Author's Affiliation NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp.
4th Author's Name Tatsuro HIRAKI
4th Author's Affiliation NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp.
5th Author's Name Hiroshi FUKUDA
5th Author's Affiliation NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp.
6th Author's Name Yasuhiko ISHIKAWA
6th Author's Affiliation Department of Material Engineering, University of Tokyo
7th Author's Name Kazumi WADA
7th Author's Affiliation Department of Material Engineering, University of Tokyo
8th Author's Name Koji YAMADA
8th Author's Affiliation NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp.
Date 2012-08-24
Paper # R2012-43,EMD2012-49,CPM2012-74,OPE2012-81,LQE2012-47
Volume (vol) vol.112
Number (no) 181
Page pp.pp.-
#Pages 4
Date of Issue