Presentation | 2012-08-24 Monolithic Integration of a Silica AWG and Ge PDs on Si Photonic Platform for One-Chip WDM Receiver Hidetaka NISHI, Tai TSUCHIZAWA, Rai KOU, Tatsuro HIRAKI, Hiroshi FUKUDA, Yasuhiko ISHIKAWA, Kazumi WADA, Koji YAMADA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Using low-temperature ECR PECVD technology, a silica-based AWG was monolithically integrated with germanium photodiodes on a Si photonic platform. We confirmed that the integrated AWG successfully demultiplex all of 16-wavelength channels and all of integrated GePDs received 1.25 Gbps PRBS signals with clear eye opening. In addition, we have mounted multi-channel transimpedance amplifiers and limiting amplifiers on the integrated photonic device using flip-chip bonding technology. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Si photonics / monolithic integration / ECR-CVD / WDM / AWG / Ge PD |
Paper # | R2012-43,EMD2012-49,CPM2012-74,OPE2012-81,LQE2012-47 |
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Conference Information | |
Committee | EMD |
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Conference Date | 2012/8/16(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electromechanical Devices (EMD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Monolithic Integration of a Silica AWG and Ge PDs on Si Photonic Platform for One-Chip WDM Receiver |
Sub Title (in English) | |
Keyword(1) | Si photonics |
Keyword(2) | monolithic integration |
Keyword(3) | ECR-CVD |
Keyword(4) | WDM |
Keyword(5) | AWG |
Keyword(6) | Ge PD |
1st Author's Name | Hidetaka NISHI |
1st Author's Affiliation | NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp.() |
2nd Author's Name | Tai TSUCHIZAWA |
2nd Author's Affiliation | NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp. |
3rd Author's Name | Rai KOU |
3rd Author's Affiliation | NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp. |
4th Author's Name | Tatsuro HIRAKI |
4th Author's Affiliation | NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp. |
5th Author's Name | Hiroshi FUKUDA |
5th Author's Affiliation | NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp. |
6th Author's Name | Yasuhiko ISHIKAWA |
6th Author's Affiliation | Department of Material Engineering, University of Tokyo |
7th Author's Name | Kazumi WADA |
7th Author's Affiliation | Department of Material Engineering, University of Tokyo |
8th Author's Name | Koji YAMADA |
8th Author's Affiliation | NTT Microsystem Integration Labs., NTT Corp.:Nanophotonics Center, NTT Corp. |
Date | 2012-08-24 |
Paper # | R2012-43,EMD2012-49,CPM2012-74,OPE2012-81,LQE2012-47 |
Volume (vol) | vol.112 |
Number (no) | 181 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |