| Presentation | 2012-08-03 Nanocarbon Interconnects : Aiming to replace ultra-fine metal interconnects Akihiro Kajita, Makoto Wada, Tatsuro Saito, Masayuki Kitamura, Yuichi Yamazaki, Masayuki Katagiri, Ban Ito, Daisuke Nishide, Takashi Matsumoto, Atsunobu Isobayashi, Mariko Suzuki, Atsuko Sakata, Masahito Watanabe, Naoshi Sakuma, Tadashi Sakai, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The width of interconnects has been shrinking toward 10nm in accordance with LSI devices shrinkage. The resistivity of such ultra-fine metal interconnects increases steeply, because the size effect on the resistivity becomes pronounced. On the other hand, interconnects with nano-carbon materials like graphene and CNT are expected to have the resistance which doesn't depend on the size due to their unique conduction mechanism. So, nano-carbon interconnects have a potential to substitute urtra-fine metal interconnects and/or metal vias with very high aspect ratio. LEAP has developed both graphene wires and CNT vias in order to be applied to the future interconnects. Some challenges to grow graphene and CNT by CVD, which is suitable for LSI fabrication process, are shown. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Interconnect / Nanocarbon / Graphene / Carbon Nano Tube |
| Paper # | SDM2012-78,ICD2012-46 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2012/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nanocarbon Interconnects : Aiming to replace ultra-fine metal interconnects |
| Sub Title (in English) | |
| Keyword(1) | Interconnect |
| Keyword(2) | Nanocarbon |
| Keyword(3) | Graphene |
| Keyword(4) | Carbon Nano Tube |
| 1st Author's Name | Akihiro Kajita |
| 1st Author's Affiliation | Low-power Electronics Association & Project (LEAP)() |
| 2nd Author's Name | Makoto Wada |
| 2nd Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 3rd Author's Name | Tatsuro Saito |
| 3rd Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 4th Author's Name | Masayuki Kitamura |
| 4th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 5th Author's Name | Yuichi Yamazaki |
| 5th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 6th Author's Name | Masayuki Katagiri |
| 6th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 7th Author's Name | Ban Ito |
| 7th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 8th Author's Name | Daisuke Nishide |
| 8th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 9th Author's Name | Takashi Matsumoto |
| 9th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 10th Author's Name | Atsunobu Isobayashi |
| 10th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 11th Author's Name | Mariko Suzuki |
| 11th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 12th Author's Name | Atsuko Sakata |
| 12th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 13th Author's Name | Masahito Watanabe |
| 13th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 14th Author's Name | Naoshi Sakuma |
| 14th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 15th Author's Name | Tadashi Sakai |
| 15th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| Date | 2012-08-03 |
| Paper # | SDM2012-78,ICD2012-46 |
| Volume (vol) | vol.112 |
| Number (no) | 170 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |