| Presentation | 2012-08-02 Scalable 3-D Vertical Chain-Cell-Type Phase-Change Memory with 4F^2 Poly-Si Diodes Masaharu KINOSHITA, Yoshitaka SASAGO, Hiroyuki MINEMURA, Yumiko ANZAI, Mitsuharu TAI, Yoshihisa FUJISAKI, Shuichi KUSABA, Tadao MORIMOTO, Takashi TAKAHAMA, Toshiyuki MINE, Akio SHIMA, Yoshiki YONAMOYO, Takashi KOBAYASHI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A three-dimensional (3-D) vertical chain-cell-type phase-change memory (VCCPCM) for next-generation large-capacity storage was developed. The VCCPCM features formation of memory holes in multi-layered stacked gates by using a single mask and a memory array without a selection transistor. As a result of this configuration, the number of process steps for fabricating the VCCPCM is reduced. The excellent scalability of the VCCPCM's new phase-change material makes it possible to reduce the cell size beyond the scaling limit of flash memory. In addition, a poly-silicon selection diode makes it possible to reduce the cell factor to 4F^2. Consequently, relative cost of the VCCPCM compared to 3-D flash memory is reduced to 0.2. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | phase-change memory / chain-cell-type / 3-D / vertical |
| Paper # | SDM2012-74,ICD2012-42 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2012/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Scalable 3-D Vertical Chain-Cell-Type Phase-Change Memory with 4F^2 Poly-Si Diodes |
| Sub Title (in English) | |
| Keyword(1) | phase-change memory |
| Keyword(2) | chain-cell-type |
| Keyword(3) | 3-D |
| Keyword(4) | vertical |
| 1st Author's Name | Masaharu KINOSHITA |
| 1st Author's Affiliation | Central Research Laboratory, Hitachi, Ltd.() |
| 2nd Author's Name | Yoshitaka SASAGO |
| 2nd Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 3rd Author's Name | Hiroyuki MINEMURA |
| 3rd Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 4th Author's Name | Yumiko ANZAI |
| 4th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 5th Author's Name | Mitsuharu TAI |
| 5th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 6th Author's Name | Yoshihisa FUJISAKI |
| 6th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 7th Author's Name | Shuichi KUSABA |
| 7th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 8th Author's Name | Tadao MORIMOTO |
| 8th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 9th Author's Name | Takashi TAKAHAMA |
| 9th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 10th Author's Name | Toshiyuki MINE |
| 10th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 11th Author's Name | Akio SHIMA |
| 11th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| 12th Author's Name | Yoshiki YONAMOYO |
| 12th Author's Affiliation | Yokohama Research Laboratory, Hitachi, Ltd. |
| 13th Author's Name | Takashi KOBAYASHI |
| 13th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
| Date | 2012-08-02 |
| Paper # | SDM2012-74,ICD2012-42 |
| Volume (vol) | vol.112 |
| Number (no) | 170 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |