| Presentation | 2012-08-02 STT MRAM Development and Its Integration with BEOL Process for Embedded Applications Toshihiro Sugii, Yoshihisa Iba, Masaki Aoki, Hideyuki Noshiro, Kouji Tsunoda, Akiyoshi Hatada, Masaaki Nakabayashi, Yuuichi Yamazaki, Atsusi Takahashi, Chikakko Yoshida, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Spin transfer torque MRAM (STT-MRAM) for embedded working memories in low power system LSIs was developed, utilizing a top-pinned magnetic tunnel junction (MTJ) combined with a highly reliable MgO tunneling insulator. Also, a basic integration process flow was designed and verified in MRAM devices on 300-mm wafers. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Spin transfer torque / STT-MRAM / MTJ / Low power / Embedded / BEOL / Integration |
| Paper # | SDM2012-73,ICD2012-41 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2012/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | STT MRAM Development and Its Integration with BEOL Process for Embedded Applications |
| Sub Title (in English) | |
| Keyword(1) | Spin transfer torque |
| Keyword(2) | STT-MRAM |
| Keyword(3) | MTJ |
| Keyword(4) | Low power |
| Keyword(5) | Embedded |
| Keyword(6) | BEOL |
| Keyword(7) | Integration |
| 1st Author's Name | Toshihiro Sugii |
| 1st Author's Affiliation | Low-power Electronics Association & Project (LEAP)() |
| 2nd Author's Name | Yoshihisa Iba |
| 2nd Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 3rd Author's Name | Masaki Aoki |
| 3rd Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 4th Author's Name | Hideyuki Noshiro |
| 4th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 5th Author's Name | Kouji Tsunoda |
| 5th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 6th Author's Name | Akiyoshi Hatada |
| 6th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 7th Author's Name | Masaaki Nakabayashi |
| 7th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 8th Author's Name | Yuuichi Yamazaki |
| 8th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 9th Author's Name | Atsusi Takahashi |
| 9th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| 10th Author's Name | Chikakko Yoshida |
| 10th Author's Affiliation | Low-power Electronics Association & Project (LEAP) |
| Date | 2012-08-02 |
| Paper # | SDM2012-73,ICD2012-41 |
| Volume (vol) | vol.112 |
| Number (no) | 170 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |