| Presentation | 2012-08-09 Fabrication of titanium oxide nanotube micro gas sensors Yasuo KIMURA, Ryota KOJIMA, Shota KIMURA, Michio NIWANO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated micro porous gas sensors which consisted of titanium oxide (TiO_2) nanotube films formed by local anodization of titanium wires through a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We detected sensing current in the range of mA when the hydrogen concentration was 10 vol.% without interdigitated platinum electrodes. This shows that miniaturization of porous gas sensors is effective in improvement of sensing current. The response characteristics were independent of the sensor size. This indicates formation of homogeneous TiO_2 nanotube films. These results indicate that the hybrid process is a suitable method for fabrication of micro porous gas sensors and that the anodic titanium oxide nanotube is a promising material. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | titanium oxide nanotube / anodization / self-organization / miniaturization |
| Paper # | CPM2012-48 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2012/8/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of titanium oxide nanotube micro gas sensors |
| Sub Title (in English) | |
| Keyword(1) | titanium oxide nanotube |
| Keyword(2) | anodization |
| Keyword(3) | self-organization |
| Keyword(4) | miniaturization |
| 1st Author's Name | Yasuo KIMURA |
| 1st Author's Affiliation | Laboratory for Nanoelectronics and Spintronics, Research Institute of Electrical Communication, Tohoku University() |
| 2nd Author's Name | Ryota KOJIMA |
| 2nd Author's Affiliation | Laboratory for Nanoelectronics and Spintronics, Research Institute of Electrical Communication, Tohoku University |
| 3rd Author's Name | Shota KIMURA |
| 3rd Author's Affiliation | Laboratory for Nanoelectronics and Spintronics, Research Institute of Electrical Communication, Tohoku University |
| 4th Author's Name | Michio NIWANO |
| 4th Author's Affiliation | Laboratory for Nanoelectronics and Spintronics, Research Institute of Electrical Communication, Tohoku University |
| Date | 2012-08-09 |
| Paper # | CPM2012-48 |
| Volume (vol) | vol.112 |
| Number (no) | 175 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |