| Presentation | 2012-08-08 Influence of Si thermal annealing on GaP structure grown on Si substrates using metalorganic vapor phase epitaxy Tatsuya TAKAGI, Ryo MIYAHARA, Yohsuke HORIE, Yasushi TAKANO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | GaP layers were grown on Si substrates using metalorganic vapor phase epitaxy. In order to suppress APD generation, Si(100) substrates 2° or 4°-misoriented toward (011) were used. The substrates were heated in a H_2 flow before GaP nucleation. Growth was initiated by supplying Triethylgallium and PH_3. The structures were characterized using atomic force microscopy (AFM) and transmission electron microscopy (TEM). Single domain GaP layers were readily obtained on 4°-misoriented substrates. At initial growth stage, however, many APDs appeared. The APD structure changed with heating conditions for Si substrates such as temperature and H_2 pressure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MOVPE / GaP / Si substrate / antiphase domain / atomic force microscopy / transmission electron microscopy |
| Paper # | CPM2012-36 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2012/8/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Influence of Si thermal annealing on GaP structure grown on Si substrates using metalorganic vapor phase epitaxy |
| Sub Title (in English) | |
| Keyword(1) | MOVPE |
| Keyword(2) | GaP |
| Keyword(3) | Si substrate |
| Keyword(4) | antiphase domain |
| Keyword(5) | atomic force microscopy |
| Keyword(6) | transmission electron microscopy |
| 1st Author's Name | Tatsuya TAKAGI |
| 1st Author's Affiliation | Faculty of Engineering, Shizuoka University() |
| 2nd Author's Name | Ryo MIYAHARA |
| 2nd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 3rd Author's Name | Yohsuke HORIE |
| 3rd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 4th Author's Name | Yasushi TAKANO |
| 4th Author's Affiliation | Faculty of Engineering, Shizuoka University |
| Date | 2012-08-08 |
| Paper # | CPM2012-36 |
| Volume (vol) | vol.112 |
| Number (no) | 175 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |