Presentation 2012-08-08
Fabrication of high-density Ge nanodots/SiC stacked structure by gas source MBE and its PL characteristics
Yutaka ANEZAKI, Kai SATO, Takahiro KATO, Ariyuki KATO, Maki SUEMITSU, Hideki NAKAZAWA, Yuzuru NARITA, Kanji YASUI,
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Abstract(in English) Ge nanodots were formed on Si(001) -2° off substrates after the formation of Si c(4×4) structure by gas-source molecular beam epitaxy using monomethylgermane as a source gas. Surface structure of the Ge nanodots was measured by scanning tunneling microscopy. SiC capping layer was deposited on the Ge dots formed by various growth conditions and SiC/Ge dots/SiC_x stacked structure was fabricated. From the Ge dot layer capped with the SiC layer, sharp and intense emission peaks were observed. The origin of the emission peaks in the photoluminescence spectra was analyzed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) gas-source MBE / Ge nanodot / SiC / scanning tunneling microscopy / photoluminescence
Paper # CPM2012-35
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Committee CPM
Conference Date 2012/8/1(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of high-density Ge nanodots/SiC stacked structure by gas source MBE and its PL characteristics
Sub Title (in English)
Keyword(1) gas-source MBE
Keyword(2) Ge nanodot
Keyword(3) SiC
Keyword(4) scanning tunneling microscopy
Keyword(5) photoluminescence
1st Author's Name Yutaka ANEZAKI
1st Author's Affiliation Nagaoka University of Technology()
2nd Author's Name Kai SATO
2nd Author's Affiliation Nagaoka University of Technology
3rd Author's Name Takahiro KATO
3rd Author's Affiliation Nagaoka University of Technology
4th Author's Name Ariyuki KATO
4th Author's Affiliation Nagaoka University of Technology
5th Author's Name Maki SUEMITSU
5th Author's Affiliation Research Institute of Electrical Communication, Tohoku University
6th Author's Name Hideki NAKAZAWA
6th Author's Affiliation Graduate School of Science & Technology, Hirosaki University
7th Author's Name Yuzuru NARITA
7th Author's Affiliation Yamagata University
8th Author's Name Kanji YASUI
8th Author's Affiliation Nagaoka University of Technology
Date 2012-08-08
Paper # CPM2012-35
Volume (vol) vol.112
Number (no) 175
Page pp.pp.-
#Pages 5
Date of Issue