| Presentation | 2012-07-27 A MEMS Mirror Array for Wavelength Selective Switches with a Structure to Suppress Electrical Interference between Adjacent Channels Mitsuo USUI, Shingo UCHIYAMA, Etsu HASHIMOTO, Tomomi SAKATA, Nobihiro SHIMOYAMA, Koichi HADAMA, Nobuaki MATSUURA, Yuzo ISHII, Tohru MATSUURA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed a new two-axis microelectromechanical systems (MEMS) mirror array for wavelength selective switches. This MEMS mirror array has a suitable structure for a narrow pitch and high fill factor. On the basis of simulation results, we designed a new electrode structure to reduce electrical interference between adjacent channels. To fabricate the MEMS mirror array module, we developed a small-sealing-packaging technology. We fabricated 50-ch-MEMS mirror array modules using this packaging technology, and confirmed the electrical interference reduction in the fabricated MEMS mirror array modules. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Wavelength selective switch(WSS) / MEMS / Mirror array / Electrical Interference / Packaging Technology |
| Paper # | MW2012-48,OPE2012-41,EST2012-30,MWP2012-29 |
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| Conference Information | |
| Committee | EST |
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| Conference Date | 2012/7/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electronic Simulation Technology (EST) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A MEMS Mirror Array for Wavelength Selective Switches with a Structure to Suppress Electrical Interference between Adjacent Channels |
| Sub Title (in English) | |
| Keyword(1) | Wavelength selective switch(WSS) |
| Keyword(2) | MEMS |
| Keyword(3) | Mirror array |
| Keyword(4) | Electrical Interference |
| Keyword(5) | Packaging Technology |
| 1st Author's Name | Mitsuo USUI |
| 1st Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation() |
| 2nd Author's Name | Shingo UCHIYAMA |
| 2nd Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 3rd Author's Name | Etsu HASHIMOTO |
| 3rd Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 4th Author's Name | Tomomi SAKATA |
| 4th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 5th Author's Name | Nobihiro SHIMOYAMA |
| 5th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 6th Author's Name | Koichi HADAMA |
| 6th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 7th Author's Name | Nobuaki MATSUURA |
| 7th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 8th Author's Name | Yuzo ISHII |
| 8th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 9th Author's Name | Tohru MATSUURA |
| 9th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| Date | 2012-07-27 |
| Paper # | MW2012-48,OPE2012-41,EST2012-30,MWP2012-29 |
| Volume (vol) | vol.112 |
| Number (no) | 157 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |