Presentation | 2012-07-27 A MEMS Mirror Array for Wavelength Selective Switches with a Structure to Suppress Electrical Interference between Adjacent Channels Mitsuo USUI, Shingo UCHIYAMA, Etsu HASHIMOTO, Tomomi SAKATA, Nobihiro SHIMOYAMA, Koichi HADAMA, Nobuaki MATSUURA, Yuzo ISHII, Tohru MATSUURA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We developed a new two-axis microelectromechanical systems (MEMS) mirror array for wavelength selective switches. This MEMS mirror array has a suitable structure for a narrow pitch and high fill factor. On the basis of simulation results, we designed a new electrode structure to reduce electrical interference between adjacent channels. To fabricate the MEMS mirror array module, we developed a small-sealing-packaging technology. We fabricated 50-ch-MEMS mirror array modules using this packaging technology, and confirmed the electrical interference reduction in the fabricated MEMS mirror array modules. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Wavelength selective switch(WSS) / MEMS / Mirror array / Electrical Interference / Packaging Technology |
Paper # | MW2012-48,OPE2012-41,EST2012-30,MWP2012-29 |
Date of Issue |
Conference Information | |
Committee | MWP |
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Conference Date | 2012/7/19(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
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Paper Information | |
Registration To | Microwave and Millimeter-wave Photonics (MWP) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | A MEMS Mirror Array for Wavelength Selective Switches with a Structure to Suppress Electrical Interference between Adjacent Channels |
Sub Title (in English) | |
Keyword(1) | Wavelength selective switch(WSS) |
Keyword(2) | MEMS |
Keyword(3) | Mirror array |
Keyword(4) | Electrical Interference |
Keyword(5) | Packaging Technology |
1st Author's Name | Mitsuo USUI |
1st Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation() |
2nd Author's Name | Shingo UCHIYAMA |
2nd Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
3rd Author's Name | Etsu HASHIMOTO |
3rd Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
4th Author's Name | Tomomi SAKATA |
4th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
5th Author's Name | Nobihiro SHIMOYAMA |
5th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
6th Author's Name | Koichi HADAMA |
6th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
7th Author's Name | Nobuaki MATSUURA |
7th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
8th Author's Name | Yuzo ISHII |
8th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
9th Author's Name | Tohru MATSUURA |
9th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
Date | 2012-07-27 |
Paper # | MW2012-48,OPE2012-41,EST2012-30,MWP2012-29 |
Volume (vol) | vol.112 |
Number (no) | 158 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |