| Presentation | 2012-06-22 Characteristics of ZnO films grown on glass substrates using high-energy H_2O generated by a catalytic reaction : Effect of a sputter deposited buffer layer T. Oyanagi, S. SATOMOTO, Kai SATO, Takahiro KATO, H. KATAGIRI, K. JINBO, Kanji YASUI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ZnO thin films were grown through a reaction between dimethylzinc and high-energy H_2O produced by a Pt-catalyzed H_2 O_2 reaction. For the application of transparent conductive thin films, the ZnO films were grown on glass substrates with and without sputtered buffer layers deposited at 250℃. By the insertion of the buffer layer with an appropriate thickness, crystal orientation along c-axis was improved. Optical transparency and electrical resistivity were also improved by the insertion of the buffer layer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / catalytic reaction / CVD / glass substrate / X-ray diffraction / optical transparency / resistivity |
| Paper # | EMD2012-10,CPM2012-27,OME2012-34 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2012/6/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristics of ZnO films grown on glass substrates using high-energy H_2O generated by a catalytic reaction : Effect of a sputter deposited buffer layer |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | catalytic reaction |
| Keyword(3) | CVD |
| Keyword(4) | glass substrate |
| Keyword(5) | X-ray diffraction |
| Keyword(6) | optical transparency |
| Keyword(7) | resistivity |
| 1st Author's Name | T. Oyanagi |
| 1st Author's Affiliation | Nagaoka University of Technology() |
| 2nd Author's Name | S. SATOMOTO |
| 2nd Author's Affiliation | Nagaoka University of Technology |
| 3rd Author's Name | Kai SATO |
| 3rd Author's Affiliation | Nagaoka University of Technology |
| 4th Author's Name | Takahiro KATO |
| 4th Author's Affiliation | Nagaoka University of Technology |
| 5th Author's Name | H. KATAGIRI |
| 5th Author's Affiliation | Nagaoka National College of Technology |
| 6th Author's Name | K. JINBO |
| 6th Author's Affiliation | Nagaoka National College of Technology |
| 7th Author's Name | Kanji YASUI |
| 7th Author's Affiliation | Nagaoka University of Technology |
| Date | 2012-06-22 |
| Paper # | EMD2012-10,CPM2012-27,OME2012-34 |
| Volume (vol) | vol.112 |
| Number (no) | 97 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |