Presentation | 2012-06-22 Characteristics of ZnO films grown on glass substrates using high-energy H_2O generated by a catalytic reaction : Effect of a sputter deposited buffer layer T. Oyanagi, S. SATOMOTO, Kai SATO, Takahiro KATO, H. KATAGIRI, K. JINBO, Kanji YASUI, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | ZnO thin films were grown through a reaction between dimethylzinc and high-energy H_2O produced by a Pt-catalyzed H_2 O_2 reaction. For the application of transparent conductive thin films, the ZnO films were grown on glass substrates with and without sputtered buffer layers deposited at 250℃. By the insertion of the buffer layer with an appropriate thickness, crystal orientation along c-axis was improved. Optical transparency and electrical resistivity were also improved by the insertion of the buffer layer. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ZnO / catalytic reaction / CVD / glass substrate / X-ray diffraction / optical transparency / resistivity |
Paper # | EMD2012-10,CPM2012-27,OME2012-34 |
Date of Issue |
Conference Information | |
Committee | CPM |
---|---|
Conference Date | 2012/6/15(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Characteristics of ZnO films grown on glass substrates using high-energy H_2O generated by a catalytic reaction : Effect of a sputter deposited buffer layer |
Sub Title (in English) | |
Keyword(1) | ZnO |
Keyword(2) | catalytic reaction |
Keyword(3) | CVD |
Keyword(4) | glass substrate |
Keyword(5) | X-ray diffraction |
Keyword(6) | optical transparency |
Keyword(7) | resistivity |
1st Author's Name | T. Oyanagi |
1st Author's Affiliation | Nagaoka University of Technology() |
2nd Author's Name | S. SATOMOTO |
2nd Author's Affiliation | Nagaoka University of Technology |
3rd Author's Name | Kai SATO |
3rd Author's Affiliation | Nagaoka University of Technology |
4th Author's Name | Takahiro KATO |
4th Author's Affiliation | Nagaoka University of Technology |
5th Author's Name | H. KATAGIRI |
5th Author's Affiliation | Nagaoka National College of Technology |
6th Author's Name | K. JINBO |
6th Author's Affiliation | Nagaoka National College of Technology |
7th Author's Name | Kanji YASUI |
7th Author's Affiliation | Nagaoka University of Technology |
Date | 2012-06-22 |
Paper # | EMD2012-10,CPM2012-27,OME2012-34 |
Volume (vol) | vol.112 |
Number (no) | 96 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |