Presentation 2012-05-25
Characterization of hole injection type APDs fabricated by CMOS process in blue wavelength region
Toshiyuki SHIMOTORI, Kazuaki MAEKITA, Takeo MARUYAMA, Koichi IIYAMA,
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Abstract(in English) Multilayer optcical discs are developed to increase the capacity of Blu-ray disc. Since the multilayer disc is transparent, a high sensitivity photodetector is required in the multilayer Blu-ray disc due to low reflected light from the transparent disc. An avalanche photodiode (APD) is a promising photodetector for multilayer Blu-ray disc because of its high sensitivity nature and fast response time. We fabricated APDs with different electrode structure by 0.18 μm standard CMOS processes, and the sensitivity and the frequency response are characterized. A large avalanche gain is achieved for the bias voltage less than 10 V. The maximum sensitivity of 2.8 A/W and the avalanche gain of 38.2 were obtained at 405 nm wavelength. The bandwidth was measured to be 350 MHz at 7.9 V bias voltage.
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Keyword(in English) Avalanche photodiode / CMOS / Blu-ray Disc
Paper # LQE2012-10
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Conference Information
Committee LQE
Conference Date 2012/5/18(1days)
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Paper Information
Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Characterization of hole injection type APDs fabricated by CMOS process in blue wavelength region
Sub Title (in English)
Keyword(1) Avalanche photodiode
Keyword(2) CMOS
Keyword(3) Blu-ray Disc
1st Author's Name Toshiyuki SHIMOTORI
1st Author's Affiliation Kanazawa University Graduate School of Natural Science & Technology()
2nd Author's Name Kazuaki MAEKITA
2nd Author's Affiliation Kanazawa University Graduate School of Natural Science & Technology
3rd Author's Name Takeo MARUYAMA
3rd Author's Affiliation Kanazawa University Graduate School of Natural Science & Technology
4th Author's Name Koichi IIYAMA
4th Author's Affiliation Kanazawa University Graduate School of Natural Science & Technology
Date 2012-05-25
Paper # LQE2012-10
Volume (vol) vol.112
Number (no) 62
Page pp.pp.-
#Pages 4
Date of Issue