| Presentation | 2012-05-25 High-efficiency Optical Coupling to Planar Photodiode using Metal Reflector loaded Waveguide Grating Coupler Gen LI, Shingo EBUCHI, Yasunori HASHIMOTO, Takeo MARUYAMA, Koichi IIYAMA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | It is required to incident light perpendicularly to Si substrate for a planar Si photodiode. We propose a grating coupler for optoelectronic integrated circuit, using an amorphous Si waveguide, which is transparent at 830 nm wavelength range. The optical waveguide coupler with structure of 300nm x 100nm is analyzed using the finite element method. The coupling efficiency of 80% is calculated at the grating period of 380 nm, the duty ratio of 0.75 and the depth of 35 nm -65 nm with top metal reflector. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Crystalline Silicon / Amorphous Silicon / Grating Coupler / Photonic Integrated Circuits |
| Paper # | LQE2012-2 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2012/5/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High-efficiency Optical Coupling to Planar Photodiode using Metal Reflector loaded Waveguide Grating Coupler |
| Sub Title (in English) | |
| Keyword(1) | Crystalline Silicon |
| Keyword(2) | Amorphous Silicon |
| Keyword(3) | Grating Coupler |
| Keyword(4) | Photonic Integrated Circuits |
| 1st Author's Name | Gen LI |
| 1st Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University() |
| 2nd Author's Name | Shingo EBUCHI |
| 2nd Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| 3rd Author's Name | Yasunori HASHIMOTO |
| 3rd Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| 4th Author's Name | Takeo MARUYAMA |
| 4th Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| 5th Author's Name | Koichi IIYAMA |
| 5th Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| Date | 2012-05-25 |
| Paper # | LQE2012-2 |
| Volume (vol) | vol.112 |
| Number (no) | 62 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |