| Presentation | 2012-05-18 A tunable color filter based on sub-wavelength gratings using electrostatic microactuator H. Honma, H. Miyao, K. Takahashi, M. Ishida, K. Sawada, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have proposed a NEMS (Nano Electro Mechanical Systems) tunable color filter using electrostatic microactuator which can control the guided-mode resonance by tuning periodic structure. The sub-wavelength gratings were fabricated using SOI (Silicon on Insulator) wafer. The free-standing nano periodic structure was successfully developed by wet sacrificial etching using buffered HF and supercritical CO2 drying technique. Color tuning from yellow to green was obtained by drive voltage of 20 V. For low voltage driving, a color filter using another NEMS actuator with three pairs of electrode was also developed. We obtained the reflected light attenuation by 34 % at 680 run wavelength with drive voltage of 6.7 V. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Sub-wavelength grating / Tunable color filter / MEMS/NEMS / SOI |
| Paper # | ED2012-39,CPM2012-23,SDM2012-41 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2012/5/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A tunable color filter based on sub-wavelength gratings using electrostatic microactuator |
| Sub Title (in English) | |
| Keyword(1) | Sub-wavelength grating |
| Keyword(2) | Tunable color filter |
| Keyword(3) | MEMS/NEMS |
| Keyword(4) | SOI |
| 1st Author's Name | H. Honma |
| 1st Author's Affiliation | Toyohashi University of Technology() |
| 2nd Author's Name | H. Miyao |
| 2nd Author's Affiliation | Toyohashi University of Technology |
| 3rd Author's Name | K. Takahashi |
| 3rd Author's Affiliation | Toyohashi University of Technology |
| 4th Author's Name | M. Ishida |
| 4th Author's Affiliation | Toyohashi University of Technology |
| 5th Author's Name | K. Sawada |
| 5th Author's Affiliation | Toyohashi University of Technology |
| Date | 2012-05-18 |
| Paper # | ED2012-39,CPM2012-23,SDM2012-41 |
| Volume (vol) | vol.112 |
| Number (no) | 34 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |