| Presentation | 2012-05-18 Co-catalyitic effect on improving the photocatalytic properties of TiO_2 films Masaaki Isai, Ikuta Nakamura, Yuki Hieda, Fumiya Fukazawa, Yoichi Hoshi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | TiO_2 films were prepared with RF magnetron sputtering method. The copper (Cu) and iron (Fe) films were deposited on the TiO_2 films. The effect of these films on the photocatalytic properties were evaluated. It was found that depositing Cu as a co-catalyst improved organic-decomposition properties, but deteriorated hydrophilicity. In the case of Fe, it was found that both organic-decomposition properties and hydrophilicity were improved. The deposition rates of Cu and Fe were successfully controlled by using a metallic mesh installing in the ion-coater. We confirmed that the thickness of each Cu and Fe films was one of the most important parameters to improve the organic-decomposition properties. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TiO_2 thin films / RF magnetron sputtering / Photocatalyst / Pratinum deposition |
| Paper # | ED2012-38,CPM2012-22,SDM2012-40 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2012/5/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Co-catalyitic effect on improving the photocatalytic properties of TiO_2 films |
| Sub Title (in English) | |
| Keyword(1) | TiO_2 thin films |
| Keyword(2) | RF magnetron sputtering |
| Keyword(3) | Photocatalyst |
| Keyword(4) | Pratinum deposition |
| 1st Author's Name | Masaaki Isai |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Ikuta Nakamura |
| 2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 3rd Author's Name | Yuki Hieda |
| 3rd Author's Affiliation | Facility of Engineering, Shizuoka University |
| 4th Author's Name | Fumiya Fukazawa |
| 4th Author's Affiliation | Facility of Engineering, Shizuoka University |
| 5th Author's Name | Yoichi Hoshi |
| 5th Author's Affiliation | Graduate School of Engineering, Tokyo Polytechnic University |
| Date | 2012-05-18 |
| Paper # | ED2012-38,CPM2012-22,SDM2012-40 |
| Volume (vol) | vol.112 |
| Number (no) | 34 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |