| Presentation | 2012-05-17 Preparation and evaluation of Ga_2O_3 oxygen sensors Masaaki Isai, Takahiro Yamamoto, Takuma Torii, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga_2O_3 has an oxygen detection characteristic at more than 900℃, so this material attracts much attention as an oxygen sensor at high temperature. The β-Ga_2O_3 films were prepared by the RF magnetron sputtering method. The influence of the two kinds of substrates, namely Si(100) and quartz to compare on the oxygen detection properties was evaluated. It was found that the oxygen gas sensor fabricated on a quartz substrate had superior oxygen detection characteristics than that fabricated on a Si substrate.. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing (RTA) / Oxygen sensor |
| Paper # | ED2012-25,CPM2012-9,SDM2012-27 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2012/5/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation and evaluation of Ga_2O_3 oxygen sensors |
| Sub Title (in English) | |
| Keyword(1) | Gallium oxide |
| Keyword(2) | Metal oxides |
| Keyword(3) | Magnetron sputtering method |
| Keyword(4) | Rapid thermal annealing (RTA) |
| Keyword(5) | Oxygen sensor |
| 1st Author's Name | Masaaki Isai |
| 1st Author's Affiliation | Faculty of Engineering, Shizuoka University() |
| 2nd Author's Name | Takahiro Yamamoto |
| 2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 3rd Author's Name | Takuma Torii |
| 3rd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| Date | 2012-05-17 |
| Paper # | ED2012-25,CPM2012-9,SDM2012-27 |
| Volume (vol) | vol.112 |
| Number (no) | 34 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |