| Presentation | 2012-05-17 Fabrication of portable hydrogen sensors based on photochemically deposited SnO_2 thin films Dengbaoleer AO, Yukihisa MORIGUCHI, Masaya ICHIMURA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated highly sensitive room temperature hydrogen sensors based on doped and undoped SnO_2 films by the photochemical deposition. For deposition of doped and undoped SnO_2 films, a small amount of the solution was dropped on the glass substrate and irradiated by the UV light. Pd was doped to the surface of the SnO_2 thin films by the photo irradiation, and then the samples were annealed. The doped and undoped samples showed resistance decrease by a factor >10^3 for a 5%H_2+Ar mixed gas (0.1atm) at room temperature. Furthermore, by combining the sample with a pocket tester, we fabricated the portable type hydrogen detector, and the response was investigated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | photochemical deposition (PCD) / SnO_2 / room temperature hydrogen sensor / resistance |
| Paper # | ED2012-24,CPM2012-8,SDM2012-26 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2012/5/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of portable hydrogen sensors based on photochemically deposited SnO_2 thin films |
| Sub Title (in English) | |
| Keyword(1) | photochemical deposition (PCD) |
| Keyword(2) | SnO_2 |
| Keyword(3) | room temperature hydrogen sensor |
| Keyword(4) | resistance |
| 1st Author's Name | Dengbaoleer AO |
| 1st Author's Affiliation | Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology() |
| 2nd Author's Name | Yukihisa MORIGUCHI |
| 2nd Author's Affiliation | Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology |
| 3rd Author's Name | Masaya ICHIMURA |
| 3rd Author's Affiliation | Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology |
| Date | 2012-05-17 |
| Paper # | ED2012-24,CPM2012-8,SDM2012-26 |
| Volume (vol) | vol.112 |
| Number (no) | 34 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |