| Presentation | 2012-04-28 Epitaxial Growth of Silicon Films on Porous Silicon Underlayer by Micro-Thermal-Plasma-Jet Irradiation Shohei HAYASHI, Ryohei MATSUBARA, Yuji FUJITA, Mitsuhisa IKEDA, Seiichiro HIGASHI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Amorphous silicon (a-Si) film on porous silicon (PS) underlayer were melted and rapid solidification was induced by micro-thermal-plasma-jet irradiation. Because the thermal conduction can be controlled by changing structure, a-Si films on PS formed by the porosity of 42 % and the PS layer thickness of 20.8 μm were easily melted by very high speed of 4000 mm/s. Crystallized Si films show a high crystalline volume fraction of ～100% and lower tensile stress compared to that of Si films crystallized on quartz substrates. In addition, crystallized Si films on PS layer show strong orientation to {100} direction, which suggests liquid phase epitaxial growth from PS layer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Micro-Thermal-Plasma-Jet / Porous Silicon / Epitaxial Growth |
| Paper # | SDM2012-14,OME2012-14 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2012/4/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Epitaxial Growth of Silicon Films on Porous Silicon Underlayer by Micro-Thermal-Plasma-Jet Irradiation |
| Sub Title (in English) | |
| Keyword(1) | Micro-Thermal-Plasma-Jet |
| Keyword(2) | Porous Silicon |
| Keyword(3) | Epitaxial Growth |
| 1st Author's Name | Shohei HAYASHI |
| 1st Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University() |
| 2nd Author's Name | Ryohei MATSUBARA |
| 2nd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 3rd Author's Name | Yuji FUJITA |
| 3rd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 4th Author's Name | Mitsuhisa IKEDA |
| 4th Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 5th Author's Name | Seiichiro HIGASHI |
| 5th Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| Date | 2012-04-28 |
| Paper # | SDM2012-14,OME2012-14 |
| Volume (vol) | vol.112 |
| Number (no) | 19 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |