| Presentation | 2012-04-27 Formation of Biaxially-Oriented Poly-Si Thin Films by Double-Line Beam Continuous-Wave Laser Lateral Crystallization for High-Performance TFT Shin-Ichiro Kuroki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Poly-Si thin films with large crystal grains of 20×2μm^2 were fabricated by continuous-wave laser lateral crystallization with Gaussian laser spot, and its high-performance TFT was also fabricated. Strain effects on the electron mobility were investigated with double-gate TFTs and tri-gate TFTs. Highly bi-axially oriented poly-Si thin films with very long grains were successfully fabricated on quartz substrates by double-line beam continuous wave laser crystallization. The newly-developed technique achieved highly-oriented silicon grains having {110}, {111} and {211} crystal orientations in the laser lateral crystallized plane, the transverse side plane and the surface plane, respectively. All the silicon grains were elongated in the laser-scanning direction and linearly arranged with a length of over 100 μm and a width of 0.7 μm. TFTs with this well-crystal oriented poly-Si thin films were also fabricated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Laser crystallization / CLC / Poly-Si / Thin Film Transistor |
| Paper # | SDM2012-6,OME2012-6 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2012/4/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation of Biaxially-Oriented Poly-Si Thin Films by Double-Line Beam Continuous-Wave Laser Lateral Crystallization for High-Performance TFT |
| Sub Title (in English) | |
| Keyword(1) | Laser crystallization |
| Keyword(2) | CLC |
| Keyword(3) | Poly-Si |
| Keyword(4) | Thin Film Transistor |
| 1st Author's Name | Shin-Ichiro Kuroki |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University:(Present office)Research Institute for Nanodevice and Bio Systems (RNBS)() |
| Date | 2012-04-27 |
| Paper # | SDM2012-6,OME2012-6 |
| Volume (vol) | vol.112 |
| Number (no) | 18 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |