| Presentation | 2012-02-07 Deterministic-doped Silicon Devices and Their Quantum Transport Takahiro SHINADA, Masahiro HORI, Filipo GUAGLIARDO, Yukinori ONO, Kuninori KUMAGAI, Takashi TANII, Enrico PRATI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Si transistors with deterministically implanted donors were fabricated by single-ion implantation method and their quantum transport was investigated. By placing donors in one dimensional array, we observed the transport characteristics categorized into two regimes: single-electron tunneling through isolated D^0 and D^- states; Hubbard band formation due to the inter-donor coupling. Our deterministic doping method is more effective and reliable for single-dopant transistor development and paves the way towards single atom electronics for extended CMOS applications. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Deterministic doping / Single-ion implantation / Ordered dopant array |
| Paper # | ED2011-142,SDM2011-159 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2012/1/31(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deterministic-doped Silicon Devices and Their Quantum Transport |
| Sub Title (in English) | |
| Keyword(1) | Deterministic doping |
| Keyword(2) | Single-ion implantation |
| Keyword(3) | Ordered dopant array |
| 1st Author's Name | Takahiro SHINADA |
| 1st Author's Affiliation | Waseda Institute for Advanced Study, Waseda University() |
| 2nd Author's Name | Masahiro HORI |
| 2nd Author's Affiliation | Graduate School of Science and Engineering, Waseda University |
| 3rd Author's Name | Filipo GUAGLIARDO |
| 3rd Author's Affiliation | Politecnico di Milano |
| 4th Author's Name | Yukinori ONO |
| 4th Author's Affiliation | NTT Basic Research Laboratories |
| 5th Author's Name | Kuninori KUMAGAI |
| 5th Author's Affiliation | Graduate School of Science and Engineering, Waseda University |
| 6th Author's Name | Takashi TANII |
| 6th Author's Affiliation | Graduate School of Science and Engineering, Waseda University |
| 7th Author's Name | Enrico PRATI |
| 7th Author's Affiliation | Laboratorio MDM, IMM, Consiglio Nazionale delle Ricerche(CNR) |
| Date | 2012-02-07 |
| Paper # | ED2011-142,SDM2011-159 |
| Volume (vol) | vol.111 |
| Number (no) | 426 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |