| Presentation | 2012-01-27 Single trench SiON waveguide TE-TM mode converter Kenichi NAKAYAMA, Yuya SHOJI, Tetsuya MIZUMOTO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A TE-TM mode converter is one of fundamental functional devices. The design, fabrication and characterization of TE-TM mode converter with a single trench SiON waveguide are described. The device has the advantage that only a single mask and etching process is needed to fabricate. Also, the wavelength dependence of mode conversion efficiency is shown to be less than 0.3% in a wavelength range between 1.25μm to 1.29μm. We succeeded in fabricating the single trench TE-TM mode converter in a SiON waveguide by using a reactive iron etching technique. A TE-TM mode conversion of 80% was measured at λ=1.27μm in a fabricated device with a 400-μm-long single trench section. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TE-TM mode converter / SiON waveguide / TE-TM mode conversion efficiency |
| Paper # | PN2011-71,OPE2011-187,LQE2011-173,EST2011-121,MWP2011-89 |
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| Conference Information | |
| Committee | MWP |
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| Conference Date | 2012/1/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Microwave and Millimeter-wave Photonics (MWP) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Single trench SiON waveguide TE-TM mode converter |
| Sub Title (in English) | |
| Keyword(1) | TE-TM mode converter |
| Keyword(2) | SiON waveguide |
| Keyword(3) | TE-TM mode conversion efficiency |
| 1st Author's Name | Kenichi NAKAYAMA |
| 1st Author's Affiliation | Dept. of Electric and Electronic Eng., Tokyo Tech() |
| 2nd Author's Name | Yuya SHOJI |
| 2nd Author's Affiliation | Dept. of Electric and Electronic Eng., Tokyo Tech |
| 3rd Author's Name | Tetsuya MIZUMOTO |
| 3rd Author's Affiliation | Dept. of Electric and Electronic Eng., Tokyo Tech |
| Date | 2012-01-27 |
| Paper # | PN2011-71,OPE2011-187,LQE2011-173,EST2011-121,MWP2011-89 |
| Volume (vol) | vol.111 |
| Number (no) | 416 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |