Presentation 2012-01-27
Transmission Characteristics of On-Chip Microstrip Lines on a Silicon CMOS Substrate Due to the Area Density and Size of Dummy Fills
Takuichi HIRANO, Kenichi OKADA, Jiro HIROKAWA, Makoto ANDO,
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Abstract(in English) Transmission characteristic of an on-chip guided microstrip line is analyzed at 60 GHz. Dependences on area density, size and location of dummy metal fills are investigated. It is found that the effect of size of dummy fills is negligibly small. Both the attenuation constant and phase constant increase by 5%, 10% and 20% when area density of dummy fills are 25%, 40% and 70%, respectively. The effect of dummy metal fills can be ignored when the spacing between the center of the line to the dummy metal fills is 1.25 times against the line width. It is also found that the arrangement of dummy metal fills can be ignored.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) CMOS / Millimeter-wave / Transmission line / Dummy metal fills / Propagation constant / Electromagnetic analysis
Paper # PN2011-63,OPE2011-179,LQE2011-165,EST2011-113,MWP2011-81
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Committee MWP
Conference Date 2012/1/19(1days)
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Registration To Microwave and Millimeter-wave Photonics (MWP)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Transmission Characteristics of On-Chip Microstrip Lines on a Silicon CMOS Substrate Due to the Area Density and Size of Dummy Fills
Sub Title (in English)
Keyword(1) CMOS
Keyword(2) Millimeter-wave
Keyword(3) Transmission line
Keyword(4) Dummy metal fills
Keyword(5) Propagation constant
Keyword(6) Electromagnetic analysis
1st Author's Name Takuichi HIRANO
1st Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology()
2nd Author's Name Kenichi OKADA
2nd Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology
3rd Author's Name Jiro HIROKAWA
3rd Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology
4th Author's Name Makoto ANDO
4th Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology
Date 2012-01-27
Paper # PN2011-63,OPE2011-179,LQE2011-165,EST2011-113,MWP2011-81
Volume (vol) vol.111
Number (no) 416
Page pp.pp.-
#Pages 4
Date of Issue