Presentation | 2011-12-15 Preparation of High-Resolution Magnetic Force Microscope Tips with Co and Fe-B Magnetic Film Coating Kazuki SONETA, Mitsuru OHTAKE, Masaaki FUTAMOTO, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Magnetic force microscope (MFM) tips are prepared by coating Si tips of 5 and 3 nm radiuses with Co and Fe-B alloy films. The effects of coating film thickness, Si tip radius, and surface undulation of coated material on the MFM resolution are investigated. The MFM resolution is influenced by both the tip radius and the MFM signal detection sensitivity. As the coating thickness increases, the sensitivity increases due to the increase in remanent magnetization of coated film material. However, with increasing the coating film thickness, the tip radius increases. A thicker coating film thickness degrades the MFM resolution due to an increase of tip radius, though the sensitivity is enhanced. A resolution of 9.0 nm is obtained with an MFM tip prepared by coating Si tip of 5 nm radius with 18-nm-thick Co film. The resolution improves to 7.8 nm by using a sharper Si tip of 3 nm radius coated with 20 nm thick Co film. The MFM resolution further improves by using an Fe_<82>B_<18> alloy material which effectively decreases the MFM tip radius through realizing a smooth surface with reduced undulations around the top of MFM tip. A resolution of 7.3 nm is obtained with an MFM tip prepared by coating a Si tip of 3 nm radius with 20-nm-thick Fe_<82>B_<18> film. The present research has shown that in order to prepare an MFM tip with high-resolution capability. It is very important to use a sharp base tip with smaller radius, coated of a higher remanent magnetization film with a smoother surface. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | magnetic force microscope / tip / resolution / Co / Fe-B alloy / perpendicular magnetic recording media |
Paper # | MR2011-30 |
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Conference Information | |
Committee | MR |
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Conference Date | 2011/12/8(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Magnetic Recording (MR) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Preparation of High-Resolution Magnetic Force Microscope Tips with Co and Fe-B Magnetic Film Coating |
Sub Title (in English) | |
Keyword(1) | magnetic force microscope |
Keyword(2) | tip |
Keyword(3) | resolution |
Keyword(4) | Co |
Keyword(5) | Fe-B alloy |
Keyword(6) | perpendicular magnetic recording media |
1st Author's Name | Kazuki SONETA |
1st Author's Affiliation | Faculty of Science and Engineering, Chuo University() |
2nd Author's Name | Mitsuru OHTAKE |
2nd Author's Affiliation | Faculty of Science and Engineering, Chuo University |
3rd Author's Name | Masaaki FUTAMOTO |
3rd Author's Affiliation | Faculty of Science and Engineering, Chuo University |
Date | 2011-12-15 |
Paper # | MR2011-30 |
Volume (vol) | vol.111 |
Number (no) | 350 |
Page | pp.pp.- |
#Pages | 8 |
Date of Issue |