| Presentation | 2011-11-29 Lithography : Past, Present, and Future Shigeki NOJIMA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Lithography / Design for manufacturability / DFM / Total optimization |
| Paper # | VLD2011-81,CPM2011-161,ICD2011-93,CPSY2011-48,DC2011-57,RECONF2011-49 |
| Date of Issue |
| Conference Information | |
| Committee | RECONF |
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| Conference Date | 2011/11/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Reconfigurable Systems (RECONF) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Lithography : Past, Present, and Future |
| Sub Title (in English) | |
| Keyword(1) | Lithography |
| Keyword(2) | Design for manufacturability |
| Keyword(3) | DFM |
| Keyword(4) | Total optimization |
| 1st Author's Name | Shigeki NOJIMA |
| 1st Author's Affiliation | Toshiba Corp. Corporate R&D Center() |
| Date | 2011-11-29 |
| Paper # | VLD2011-81,CPM2011-161,ICD2011-93,CPSY2011-48,DC2011-57,RECONF2011-49 |
| Volume (vol) | vol.111 |
| Number (no) | 323 |
| Page | pp.pp.- |
| #Pages | 42 |
| Date of Issue | |