Presentation 2011-11-29
Lithography : Past, Present, and Future
Shigeki NOJIMA,
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Abstract(in English)
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Keyword(in English) Lithography / Design for manufacturability / DFM / Total optimization
Paper # VLD2011-81,CPM2011-161,ICD2011-93,CPSY2011-48,DC2011-57,RECONF2011-49
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Committee RECONF
Conference Date 2011/11/21(1days)
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Registration To Reconfigurable Systems (RECONF)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Lithography : Past, Present, and Future
Sub Title (in English)
Keyword(1) Lithography
Keyword(2) Design for manufacturability
Keyword(3) DFM
Keyword(4) Total optimization
1st Author's Name Shigeki NOJIMA
1st Author's Affiliation Toshiba Corp. Corporate R&D Center()
Date 2011-11-29
Paper # VLD2011-81,CPM2011-161,ICD2011-93,CPSY2011-48,DC2011-57,RECONF2011-49
Volume (vol) vol.111
Number (no) 323
Page pp.pp.-
#Pages 42
Date of Issue