Presentation 2011-11-18
Fabrication of Step-Edge Vertical Channel Organic Field-Effect Transistors Using Nanoimprint Lithography
Masahiro FUKIYAMA, Hiroshi YAMAUCHI, Masaaki IIZUKA, Masatoshi SAKAI, Kazuhiro KUDO,
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Abstract(in English) The reduction of channel length is one of the effective approaches to achieve the low operation voltage and large current. We have fabricated the step-edge vertical channel organic field-effect transistors (SVC-OFET) using nanoimprint lithography (NIL) and measured their FET characteristics. A short channel with sub-micrometers can be easily achieved by forming the channel on the side wall of the step-edge structure by the simple NIL process. Pentacene and 6,13-bis(triisopropyl-silylethynyl)pentacene (TIPS-pentacene) films used as organic semiconductors were formed by a vacuum evaporation and a drop casting method, respectively.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Nanoimprint lithography / Organic field-effect transistor / Short channel length / Pentacene / TIPS-pentacene
Paper # OME2011-63,OPE2011-138
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Conference Information
Committee OME
Conference Date 2011/11/11(1days)
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Paper Information
Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of Step-Edge Vertical Channel Organic Field-Effect Transistors Using Nanoimprint Lithography
Sub Title (in English)
Keyword(1) Nanoimprint lithography
Keyword(2) Organic field-effect transistor
Keyword(3) Short channel length
Keyword(4) Pentacene
Keyword(5) TIPS-pentacene
1st Author's Name Masahiro FUKIYAMA
1st Author's Affiliation Graduate School of Engineering, Chiba University()
2nd Author's Name Hiroshi YAMAUCHI
2nd Author's Affiliation Graduate School of Engineering, Chiba University
3rd Author's Name Masaaki IIZUKA
3rd Author's Affiliation Faculty of Education, Chiba University
4th Author's Name Masatoshi SAKAI
4th Author's Affiliation Graduate School of Engineering, Chiba University
5th Author's Name Kazuhiro KUDO
5th Author's Affiliation Graduate School of Engineering, Chiba University
Date 2011-11-18
Paper # OME2011-63,OPE2011-138
Volume (vol) vol.111
Number (no) 302
Page pp.pp.-
#Pages 6
Date of Issue