| Presentation | 2011-11-18 Chracteristics of AlN crystal growth depending on m- and a-axis oriented off-angle of c-sapphire substrate and fabrication of high-efficiency AlGaN deep-UV LEDs Noritoshi MAEDA, Sachie FUJIKAWA, Hideki HIRAYAMA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We investigated the characteristics of AlN crystal growth depending on m- and a-axis oriented off-angle of c-sapphire substrate by the metal-organic chemical vapor phase deposition (MOCVD). We found that a macrostep geometry is generated on m-axis oriented samples but macrostep disappears on a-axis oriented one. It has already been reported that small off-angle such as under-1° makes macrostep to disappear for a-axis oriented sample. However, it has not been investigated so much for macrostep on m-axis oriented sample. Finally we achieved high-efficiency AlGaN quantum well (QW) deep-ultraviolet (DUV) light-emitting diodes (LEDs) on AlN templates grown on both a- and m-axis oriented. The peak wavelengths were 270 and 277 nm, respectively. The maximum external quantum efficiencies (EQEs) of the LEDs were 3.8 and 3.2 %, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | deep-UV LEDs / AlGaN / AlN / MOCVD / step bunching / sapphire |
| Paper # | ED2011-94,CPM2011-143,LQE2011-117 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2011/11/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Chracteristics of AlN crystal growth depending on m- and a-axis oriented off-angle of c-sapphire substrate and fabrication of high-efficiency AlGaN deep-UV LEDs |
| Sub Title (in English) | |
| Keyword(1) | deep-UV LEDs |
| Keyword(2) | AlGaN |
| Keyword(3) | AlN |
| Keyword(4) | MOCVD |
| Keyword(5) | step bunching |
| Keyword(6) | sapphire |
| 1st Author's Name | Noritoshi MAEDA |
| 1st Author's Affiliation | RIKEN() |
| 2nd Author's Name | Sachie FUJIKAWA |
| 2nd Author's Affiliation | RIKEN |
| 3rd Author's Name | Hideki HIRAYAMA |
| 3rd Author's Affiliation | RIKEN |
| Date | 2011-11-18 |
| Paper # | ED2011-94,CPM2011-143,LQE2011-117 |
| Volume (vol) | vol.111 |
| Number (no) | 290 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |