| Presentation | 2011-11-18 Microstructural observation of AlGaN on ELO-AlN Kimiyasu IDE, Junichi YAMAMOTO, Motoaki IWAYA, Tetsuya TAKEUCHI, Satoshi KAMIYAMA, Isamu AKASAKI, Hiroshi AMANO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | AlGaN-based ultraviolet light emitting device has been achieved as the high spec LED from UV-A to UV-C. It is widely expected to be commercialized in the future. Currently UV LED is being fabricated on AlN template but formed AlGaN on the AlN template introduces the defect by the AlGaN compressive stress. After time, to achieve high efficiency UV LED further, we know exactly the behavior of this defect and it is very important to control it. Tn this study, to form a high-quality AlGaN on AlN prepared using ELO. We observed about the behavior of dislocations in this sample. In particular this study, we discussed in detail about the thickness dependence of AlGaN. Since there were differences in the dislocation to occur near the interface by the film thickness,and report its results. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlGaN / AlN / TEM / dislocation relaxation |
| Paper # | ED2011-89,CPM2011-138,LQE2011-112 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2011/11/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Microstructural observation of AlGaN on ELO-AlN |
| Sub Title (in English) | |
| Keyword(1) | AlGaN |
| Keyword(2) | AlN |
| Keyword(3) | TEM |
| Keyword(4) | dislocation relaxation |
| 1st Author's Name | Kimiyasu IDE |
| 1st Author's Affiliation | Fac. Sci. & Eng., Meijo University() |
| 2nd Author's Name | Junichi YAMAMOTO |
| 2nd Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 3rd Author's Name | Motoaki IWAYA |
| 3rd Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 4th Author's Name | Tetsuya TAKEUCHI |
| 4th Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 5th Author's Name | Satoshi KAMIYAMA |
| 5th Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 6th Author's Name | Isamu AKASAKI |
| 6th Author's Affiliation | Fac. Sci. & Eng., Meijo University:Akasaki Research Center, Nagoya University |
| 7th Author's Name | Hiroshi AMANO |
| 7th Author's Affiliation | Grad. Sch. of Eng., Nagoya University:Akasaki Research Center, Nagoya University |
| Date | 2011-11-18 |
| Paper # | ED2011-89,CPM2011-138,LQE2011-112 |
| Volume (vol) | vol.111 |
| Number (no) | 291 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |