| Presentation | 2011-11-17 Etch-pit method of threading dislocations in epitaxial AlN films Takuya NOMURA, Hideto MIYAKE, Kazumasa HIRAMATSU, Yuuki RYU, Takaaki KUWAHARA, Noriyuki KUWANO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | AlN is an attractive substrate for short-wavelength optoelectronics devices based on AlGaN. We have investigated threading dislocations (TDs) in epitaxial AlN films by etch-pit method. Epitaxial AlN films were etched by mixed acid solution (KOH+NaOH). The etch-pits were classified into 3 kinds of TD groups by those size. The TD density in AlN substrate grown by sublimation method was less than that of an epitaxial AlN on a sapphire, and did not increase after HVPE growth of the thick AlN on the sublimation-AlN substrate. Moreover, thick AlN films were grown on AlN/sapphire stripe seeds with triangular shape in cross section of the stripe pattern, and the TDs density on the surface of HVPE-grown films was reduced by the effect of facet control techniques. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlN / HVPE / etch-pit method / threading dislocations / facet control |
| Paper # | ED2011-75,CPM2011-124,LQE2011-98 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2011/11/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Etch-pit method of threading dislocations in epitaxial AlN films |
| Sub Title (in English) | |
| Keyword(1) | AlN |
| Keyword(2) | HVPE |
| Keyword(3) | etch-pit method |
| Keyword(4) | threading dislocations |
| Keyword(5) | facet control |
| 1st Author's Name | Takuya NOMURA |
| 1st Author's Affiliation | Department Mie University() |
| 2nd Author's Name | Hideto MIYAKE |
| 2nd Author's Affiliation | Department Mie University |
| 3rd Author's Name | Kazumasa HIRAMATSU |
| 3rd Author's Affiliation | Department Mie University |
| 4th Author's Name | Yuuki RYU |
| 4th Author's Affiliation | Department of Applied Science for Electronics and Materials, Kyushu University |
| 5th Author's Name | Takaaki KUWAHARA |
| 5th Author's Affiliation | Department of Applied Science for Electronics and Materials, Kyushu University |
| 6th Author's Name | Noriyuki KUWANO |
| 6th Author's Affiliation | Department of Applied Science for Electronics and Materials, Kyushu University:Art, Science and Technology Center for Cooperative Research, Kyushu University |
| Date | 2011-11-17 |
| Paper # | ED2011-75,CPM2011-124,LQE2011-98 |
| Volume (vol) | vol.111 |
| Number (no) | 291 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |