| Presentation | 2011-10-21 High Purity Metal Organic Gas Distribution System Satoru YAMASHITA, Hidekazu ISHII, Yoshinobu SHIBA, Masafumi KITANO, Yasuyuki SHIRAI, Shigetoshi SUGAWA, Tadahiro OHMI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The gas flow control is important factor that influenced to the concentration of process gas and the pressure of process chamber. In composite semiconductor manufacturing process that using metal organic (MO) gases, the flow control system that controls the flow rate of MO gas must be established to improve the film performance and reliability of film formation process. So, flow control system based on pressure measurement (FCS) for high temperature was developed and it is possible to control the flow rate of MO gases. Also, the concentration of MO gas was controlled with great accuracy. Furthermore, liquid source control system (LSCS) was developed for the purpose of reduction of MO gas distribution system area and thermal history. And the system that MO material only the quantity needed was vaporized and control the flow rate of MO gas was developed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | metal organic gas / MOCVD / flow control system |
| Paper # | SDM2011-112 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2011/10/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High Purity Metal Organic Gas Distribution System |
| Sub Title (in English) | |
| Keyword(1) | metal organic gas |
| Keyword(2) | MOCVD |
| Keyword(3) | flow control system |
| 1st Author's Name | Satoru YAMASHITA |
| 1st Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University() |
| 2nd Author's Name | Hidekazu ISHII |
| 2nd Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
| 3rd Author's Name | Yoshinobu SHIBA |
| 3rd Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
| 4th Author's Name | Masafumi KITANO |
| 4th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
| 5th Author's Name | Yasuyuki SHIRAI |
| 5th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
| 6th Author's Name | Shigetoshi SUGAWA |
| 6th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University:Graduate School of Engineering, Tohoku University |
| 7th Author's Name | Tadahiro OHMI |
| 7th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
| Date | 2011-10-21 |
| Paper # | SDM2011-112 |
| Volume (vol) | vol.111 |
| Number (no) | 249 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |