| Presentation | 2011-10-20 Statistical Evaluations of Generation and Recovery Characteristics of Anomalous Stress Induced Leakage Current Takuya INATSUKA, Yuki KUMAGAI, Rihito KURODA, Akinobu TERAMOTO, Shigetoshi SUGAWA, Tadahiro OHMI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have statistically evaluated anomalous stress induced leakage current (SILC) which is generated by electric stress applied to gate oxide. Anomalous SILC indicates much larger current density than average SILC, which is critical problem to Flash memories. Our previous study has reported discrete generation and recovery of anomalous SILC which depend on measurement temperature and stress time. In this paper we have investigated characteristics of anomalous SILC in time domain to clarify that recovery characteristics are much different between normal and anomalous SILCs. Furthermore we have investigated dependences of recovery tendencies on temperature and stress conditions. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | anomalous SILC / random telegraph signal / recovery |
| Paper # | SDM2011-99 |
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| Committee | SDM |
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| Conference Date | 2011/10/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Statistical Evaluations of Generation and Recovery Characteristics of Anomalous Stress Induced Leakage Current |
| Sub Title (in English) | |
| Keyword(1) | anomalous SILC |
| Keyword(2) | random telegraph signal |
| Keyword(3) | recovery |
| 1st Author's Name | Takuya INATSUKA |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Yuki KUMAGAI |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Rihito KURODA |
| 3rd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Akinobu TERAMOTO |
| 4th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
| 5th Author's Name | Shigetoshi SUGAWA |
| 5th Author's Affiliation | Graduate School of Engineering, Tohoku University:New Industry Creation Hatchery Center, Tohoku University |
| 6th Author's Name | Tadahiro OHMI |
| 6th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
| Date | 2011-10-20 |
| Paper # | SDM2011-99 |
| Volume (vol) | vol.111 |
| Number (no) | 249 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |