| Presentation | 2011-10-31 Loss Reduction of Longitudinal-Type Leaky SAW by Reverse Proton Exchange Masaya ABE, Shoji KAKIO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The longitudinal-type leaky surface acoustic wave (LLSAW) is one of the SAW modes that is advantages for application to high-frequency SAW devices because of its high phase velocity close to that of a longitudinal bulk wave. However, the LLSAW has huge inherent attenuation. In this study, to reduce the attenuation of the LLSAW, we proposed a layered structure of air, a bulk LiNbO_3 (LN) layer, and an elastically softened LN substrate. When the layered structure was applied to X-36°Y LN with a large coupling factor K^2 for the LLSAW, zero attenuation for the metallized surface was obtained theoretically at a certain depth of the bulk layer. To realize such a layered structure, a reverse proton exchange (RPE) process was applied to X-36°Y LN, and the propagation and resonance properties of the LLSAW were evaluated. A good region existed on the RPE wafer, in which the value of K^2 for the Rayleigh wave was recovered to approximately 80% of that of the virgin wafer. In comparison with the virgin wafer, the propagation loss for the free surface of the good region on the RPE wafer was decreased threefold, the insertion loss was decreased drastically, and the resonance properties were improved markedly. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Longitudinal-type leaky SAW / Reverse proton exchange / Propagation loss / Resonance property |
| Paper # | US2011-64 |
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| Committee | US |
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| Conference Date | 2011/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Loss Reduction of Longitudinal-Type Leaky SAW by Reverse Proton Exchange |
| Sub Title (in English) | |
| Keyword(1) | Longitudinal-type leaky SAW |
| Keyword(2) | Reverse proton exchange |
| Keyword(3) | Propagation loss |
| Keyword(4) | Resonance property |
| 1st Author's Name | Masaya ABE |
| 1st Author's Affiliation | Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi() |
| 2nd Author's Name | Shoji KAKIO |
| 2nd Author's Affiliation | Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi |
| Date | 2011-10-31 |
| Paper # | US2011-64 |
| Volume (vol) | vol.111 |
| Number (no) | 272 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |