| Presentation | 2011-10-31 Resonance Properties of Surface Acoustic Wave Resonators in Supercritical CO_2 Katsuhiro HAYASHI, Shoji KAKIO, Eiichi KONDOH, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A supercritical fluid is a fluid at a temperature and pressure above its critical point. Supercritical CO_2 functions as a moderate solvent, has zero surface tension, and has high permeability in fine structures. These properties are regarded as ideal for the processing of nano- and microscale substances, and research and development on the formation of such substances and processes have been carried out actively. A problem of applying supercritical fluids is the heterogeneity of their molecular distribution, i.e., fluctuations in their density. By utilizing a surface acoustic wave (SAW), it may be possible to realize a sensor for measuring the density fluctuation. In this study, the resonance property of a shear-horizontal-type SAW resonator fabricated on 36° YX-LiTaO_3 substrate and the impedance of interdigitated electrode (IDE) fabricated on a nonpiezoelectric substrate were measured in high-pressure CO_2. Abrupt changes in the resonance properties due to discontinuous changes in the density and viscosity were observed at a certain CO_2 pressure. The IDE impedance change due to discontinuous changes in the permittivity was also observed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Supercritical CO_2 / Fluctuations of density / SAW resonator / Shear-horizontal-type SAW / Interdigitated electrode |
| Paper # | US2011-58 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2011/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Resonance Properties of Surface Acoustic Wave Resonators in Supercritical CO_2 |
| Sub Title (in English) | |
| Keyword(1) | Supercritical CO_2 |
| Keyword(2) | Fluctuations of density |
| Keyword(3) | SAW resonator |
| Keyword(4) | Shear-horizontal-type SAW |
| Keyword(5) | Interdigitated electrode |
| 1st Author's Name | Katsuhiro HAYASHI |
| 1st Author's Affiliation | Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi() |
| 2nd Author's Name | Shoji KAKIO |
| 2nd Author's Affiliation | Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi |
| 3rd Author's Name | Eiichi KONDOH |
| 3rd Author's Affiliation | Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi |
| Date | 2011-10-31 |
| Paper # | US2011-58 |
| Volume (vol) | vol.111 |
| Number (no) | 272 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |