| Presentation | 2011-09-26 Electromechanical coupling coefficient of SH-SAW in c-axis parallel oriented ZnO film/non-crystalline substrate structure Yuta NAKAHIGASHI, Takahiko YANAGITANI, Mami MATSUKAWA, Yoshiaki WATANABE, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A shear horizontal type surface acoustic wave (SH-SAW) propagates at liquid/solid interface without energy leakage to the liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K^2 value in IDT/ZnO (0°, 90°, ψ) film/silica glass substrate structure showed that maximum value of K^2=3.4 % was found ψ=55° with H/λ=0.21. In this study, we fabricated these structures and evaluated K^2 values. Finally, excitations of SH-SAW were performed in the liquid. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | c-axis parallel oriented ZnO film / SH-SAW / electromechanical coupling coefficient |
| Paper # | US2011-50 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2011/9/19(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electromechanical coupling coefficient of SH-SAW in c-axis parallel oriented ZnO film/non-crystalline substrate structure |
| Sub Title (in English) | |
| Keyword(1) | c-axis parallel oriented ZnO film |
| Keyword(2) | SH-SAW |
| Keyword(3) | electromechanical coupling coefficient |
| 1st Author's Name | Yuta NAKAHIGASHI |
| 1st Author's Affiliation | Faculty of Engineering, Doshisha University() |
| 2nd Author's Name | Takahiko YANAGITANI |
| 2nd Author's Affiliation | Nagoya Institute of Technology |
| 3rd Author's Name | Mami MATSUKAWA |
| 3rd Author's Affiliation | Faculty of Engineering, Doshisha University |
| 4th Author's Name | Yoshiaki WATANABE |
| 4th Author's Affiliation | Faculty of Engineering, Doshisha University |
| Date | 2011-09-26 |
| Paper # | US2011-50 |
| Volume (vol) | vol.111 |
| Number (no) | 215 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |