| Presentation | 2011-10-12 Development of Nb Multi-layer Advanced Process for Large-scale SFQ circuits Shuichi NAGASAWA, Kenji HINODE, Tetsuro SATOH, Mutsuo HIDAKA, Akira FUJIMAKI, Hiroyuki AKAIKE, Yoshiyuki YOSHIKAWA, Kazuyoshi TAKAGI, Naofumi TAKAGI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have been developing a Nb multi-layer fabrication process for large-scale SFQ circuits. We have been evaluating both diagnostic chips and shift register chips to improve reliability of the fabrication process. The diagnostic chip was designed to evaluate the characteristics of the basic elements such as junctions, contacts, resisters, and wirings in addition to their defect evaluations. The shift register chip was designed to evaluate defects in real SFQ circuits and defects depending circuit size. We discuss a correlation of defects between the diagnostic chips and the shift register chips, and describe detail of the measurement results of the shift register chips to investigate the many possible causes of the problems and improving reliability in our fabrication process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SFQ Circuit / Superconducting Integrated Circuit / Fabrication Process / Multi-layer Structure / Niobium / Shift Register |
| Paper # | SCE2011-18 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2011/10/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Nb Multi-layer Advanced Process for Large-scale SFQ circuits |
| Sub Title (in English) | |
| Keyword(1) | SFQ Circuit |
| Keyword(2) | Superconducting Integrated Circuit |
| Keyword(3) | Fabrication Process |
| Keyword(4) | Multi-layer Structure |
| Keyword(5) | Niobium |
| Keyword(6) | Shift Register |
| 1st Author's Name | Shuichi NAGASAWA |
| 1st Author's Affiliation | Superconductivity Research Laboratory, ISTEC:CREST-JST() |
| 2nd Author's Name | Kenji HINODE |
| 2nd Author's Affiliation | Superconductivity Research Laboratory, ISTEC:CREST-JST |
| 3rd Author's Name | Tetsuro SATOH |
| 3rd Author's Affiliation | Superconductivity Research Laboratory, ISTEC:CREST-JST |
| 4th Author's Name | Mutsuo HIDAKA |
| 4th Author's Affiliation | Superconductivity Research Laboratory, ISTEC:CREST-JST |
| 5th Author's Name | Akira FUJIMAKI |
| 5th Author's Affiliation | Nagoya University:CREST-JST |
| 6th Author's Name | Hiroyuki AKAIKE |
| 6th Author's Affiliation | Nagoya University:CREST-JST |
| 7th Author's Name | Yoshiyuki YOSHIKAWA |
| 7th Author's Affiliation | Yokohama National University:CREST-JST |
| 8th Author's Name | Kazuyoshi TAKAGI |
| 8th Author's Affiliation | Kyoto University:CREST-JST |
| 9th Author's Name | Naofumi TAKAGI |
| 9th Author's Affiliation | Kyoto University:CREST-JST |
| Date | 2011-10-12 |
| Paper # | SCE2011-18 |
| Volume (vol) | vol.111 |
| Number (no) | 230 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |