Presentation 2011-10-06
A Study of Electromagnetic Modeling of GSG Probes for On-Wafer Measurement
Takuichi HIRANO, Kenichi OKADA, Jiro HIROKAWA, Makoto ANDO,
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Abstract(in English) On-chip analog RF circuits are measured using GSG probes by contacting them onto pads. Electromagnetic simulation modeling including pads is sometimes necessary. The authors had reported electromagnetic simulation modeling for excitations using GSG pads with symmetric circuit, and the validity was confirmed by measurement. In this report, the previous work is extended, and electromagnetic simulation modeling for the circuit without symmetry is investigated.
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Keyword(in English) Electromagnetic Analysis Modeling / GSG Probe / Pad / On-Wafer Measurement / Millimeter-Wave / CMOS
Paper # EST2011-67
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Committee EST
Conference Date 2011/9/29(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A Study of Electromagnetic Modeling of GSG Probes for On-Wafer Measurement
Sub Title (in English)
Keyword(1) Electromagnetic Analysis Modeling
Keyword(2) GSG Probe
Keyword(3) Pad
Keyword(4) On-Wafer Measurement
Keyword(5) Millimeter-Wave
Keyword(6) CMOS
1st Author's Name Takuichi HIRANO
1st Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology()
2nd Author's Name Kenichi OKADA
2nd Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology
3rd Author's Name Jiro HIROKAWA
3rd Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology
4th Author's Name Makoto ANDO
4th Author's Affiliation Graduate School of Science and Engineering, Tokyo Institute of Technology
Date 2011-10-06
Paper # EST2011-67
Volume (vol) vol.111
Number (no) 224
Page pp.pp.-
#Pages 6
Date of Issue