| Presentation | 2011-08-10 Direct Nitridation of SiC Surface and Characterization of Nitride/SiC Interface Takashi SAKAI, Mitsunori HEMMI, Yusuke MURATA, Shinichiro SUZUKI, Tomohiko YAMAKAMI, Rinpei HAYASIBE, Kiichi KAMIMURA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A nitride layer was formed on a SiC surface by direct nitridation method to use an interfacial layer of the SiC MIS structure. The XPS measurement of nitrided surface showed that the diffusion length of nitrogen in the nitridation layer was found to be extremely small, and that the direct nitridation layer was easily oxidized by the residual oxygen in SiO_2 CVD system. The direct nitridation was effective to reduce the interface state density between the insulating layer and the 4H-SiC substrate. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SiC / direct nitridation / MOS / interface states |
| Paper # | CPM2011-58 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2011/8/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Direct Nitridation of SiC Surface and Characterization of Nitride/SiC Interface |
| Sub Title (in English) | |
| Keyword(1) | SiC |
| Keyword(2) | direct nitridation |
| Keyword(3) | MOS |
| Keyword(4) | interface states |
| 1st Author's Name | Takashi SAKAI |
| 1st Author's Affiliation | Faculty of Engineering, Shinshu University() |
| 2nd Author's Name | Mitsunori HEMMI |
| 2nd Author's Affiliation | Faculty of Engineering, Shinshu University |
| 3rd Author's Name | Yusuke MURATA |
| 3rd Author's Affiliation | Faculty of Engineering, Shinshu University |
| 4th Author's Name | Shinichiro SUZUKI |
| 4th Author's Affiliation | Faculty of Engineering, Shinshu University |
| 5th Author's Name | Tomohiko YAMAKAMI |
| 5th Author's Affiliation | Faculty of Engineering, Shinshu University |
| 6th Author's Name | Rinpei HAYASIBE |
| 6th Author's Affiliation | Faculty of Engineering, Shinshu University |
| 7th Author's Name | Kiichi KAMIMURA |
| 7th Author's Affiliation | Faculty of Engineering, Shinshu University |
| Date | 2011-08-10 |
| Paper # | CPM2011-58 |
| Volume (vol) | vol.111 |
| Number (no) | 176 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |