| Presentation | 2011-06-30 Adhesion Improvement of Fluoropolymer Thin Films by Ion-Assisted Vapor Deposition Polymerization Kazuo SENDA, Tsuyoshi MATSUDA, Kuniaki TANAKA, Hiroaki USUI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A novel dry process for depositing fluoropolymer thin film was developed by vapor deposition polymerization under the assistance by ion irradiation. The ion irradiation is effective in removing the impurities on the substrate surface. Moreover, it enables smoothening, chemical activation and physical treatment of the substrate surface. As a consequence, highly uniform fluoropolymer thin films with excellent adhesion were obtained. Their adhesion strength was compared to those fluoropolymer films that were prepared by the spin-coating method. Moreover, the ion-assisted deposition polymerization was capable of controlling the film characteristics by adjusting the ion acceleration voltage. The deposited films have low refractive index, which makes them attractive as the antireflective coating. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ion-assisted deposition / deposition polymerization / fluoropolymer / fluorinated alkylacrylate / adhesion strength / surface treatment / antireflective coating |
| Paper # | EMD2011-15,CPM2011-51,OME2011-29 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2011/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Adhesion Improvement of Fluoropolymer Thin Films by Ion-Assisted Vapor Deposition Polymerization |
| Sub Title (in English) | |
| Keyword(1) | ion-assisted deposition |
| Keyword(2) | deposition polymerization |
| Keyword(3) | fluoropolymer |
| Keyword(4) | fluorinated alkylacrylate |
| Keyword(5) | adhesion strength |
| Keyword(6) | surface treatment |
| Keyword(7) | antireflective coating |
| 1st Author's Name | Kazuo SENDA |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology() |
| 2nd Author's Name | Tsuyoshi MATSUDA |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology |
| 3rd Author's Name | Kuniaki TANAKA |
| 3rd Author's Affiliation | Tokyo University of Agriculture and Technology |
| 4th Author's Name | Hiroaki USUI |
| 4th Author's Affiliation | Tokyo University of Agriculture and Technology |
| Date | 2011-06-30 |
| Paper # | EMD2011-15,CPM2011-51,OME2011-29 |
| Volume (vol) | vol.111 |
| Number (no) | 109 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |