| Presentation | 2011-05-19 High thickness AlN growth with period trench patterned c-plane AlN on a-plane Sapphire by low-pressure HVPE Yuta TAKAGI, Hideto MIYAKE, Kazumasa HIRAMATSU, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The technique of period trench patterned AlN on Sapphire substrate is effective to obtain crack-free thick AlN film. The AlN was grown on period-trench pattern a-plane Sapphire by low-pressure HVPE. Epitaxial relationship between AlN and a-plane Sapphire was 90 degrees rotated for changing growth temperature and/or cleaning ambient. According to relationship of coalescing planes, two trench directions <0001>_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlN / a-plane Sapphire / HVPE / trench pattern |
| Paper # | ED2011-2,CPM2011-9,SDM2011-15 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2011/5/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High thickness AlN growth with period trench patterned c-plane AlN on a-plane Sapphire by low-pressure HVPE |
| Sub Title (in English) | |
| Keyword(1) | AlN |
| Keyword(2) | a-plane Sapphire |
| Keyword(3) | HVPE |
| Keyword(4) | trench pattern |
| 1st Author's Name | Yuta TAKAGI |
| 1st Author's Affiliation | Faculty of Engineering, Mie University() |
| 2nd Author's Name | Hideto MIYAKE |
| 2nd Author's Affiliation | Faculty of Engineering, Mie University |
| 3rd Author's Name | Kazumasa HIRAMATSU |
| 3rd Author's Affiliation | Faculty of Engineering, Mie University |
| Date | 2011-05-19 |
| Paper # | ED2011-2,CPM2011-9,SDM2011-15 |
| Volume (vol) | vol.111 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |