Presentation 2011-05-20
Study on AlInN barrier layer of GaInN channel HFET
Kazuya IKEDA, Yasuhiro ISOBE, Hiromichi IKKI, Naofumi HORIO, Tatsuyuki SKAKIBARA, Motoaki IWAYA, Tetsuya TAKEUCHI, Satoshi KAMIYAMA, Isamu AKASAKI, Hiroshi AMANO,
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Abstract(in English) GaInN channel heterostructure field-effect transistors (HFETs) are promising for applications involving high operation current because they spontaneously produce high-density sheet carriers and strongly confine two-dimensional electron gases (2DEGs) owing to their large conduction band offset, and the large polarization charges. HFET using an AlInN barrier layer is also promising for a lattice-matched large-bandgap barrier structure. In addition, the MOVPE growth conditions for GaInN channel and AlInN barriers are similar. Thus, the combination of these materials is expected to achieve high-performance HFETs. In this study, we report on the electrical properties of AlInN/GaInN based heterostructures fabricated on a GaN template. We also fabricated and characterized AlInN/GaInN HFETs.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AlInN / GaInN / AlN / HFET
Paper # ED2011-35,CPM2011-42,SDM2011-48
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Committee ED
Conference Date 2011/5/12(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Study on AlInN barrier layer of GaInN channel HFET
Sub Title (in English)
Keyword(1) AlInN
Keyword(2) GaInN
Keyword(3) AlN
Keyword(4) HFET
1st Author's Name Kazuya IKEDA
1st Author's Affiliation Fac. Sci. & Eng., Meijo University()
2nd Author's Name Yasuhiro ISOBE
2nd Author's Affiliation Fac. Sci. & Eng., Meijo University
3rd Author's Name Hiromichi IKKI
3rd Author's Affiliation Fac. Sci. & Eng., Meijo University
4th Author's Name Naofumi HORIO
4th Author's Affiliation Fac. Sci. & Eng., Meijo University
5th Author's Name Tatsuyuki SKAKIBARA
5th Author's Affiliation Fac. Sci. & Eng., Meijo University
6th Author's Name Motoaki IWAYA
6th Author's Affiliation Fac. Sci. & Eng., Meijo University
7th Author's Name Tetsuya TAKEUCHI
7th Author's Affiliation Fac. Sci. & Eng., Meijo University
8th Author's Name Satoshi KAMIYAMA
8th Author's Affiliation Fac. Sci. & Eng., Meijo University
9th Author's Name Isamu AKASAKI
9th Author's Affiliation Fac. Sci. & Eng., Meijo University:Akasaki Research Center, Nagoya University
10th Author's Name Hiroshi AMANO
10th Author's Affiliation Grad. Sch. of Eng., Nagoya University:Akasaki Research Center, Nagoya University
Date 2011-05-20
Paper # ED2011-35,CPM2011-42,SDM2011-48
Volume (vol) vol.111
Number (no) 44
Page pp.pp.-
#Pages 5
Date of Issue