Presentation | 2011-05-20 Preparation and evaluation of Ga_2O_3 oxygen sensors Takahiro YAMAMOTO, Shinya KAYANO, Hiroki IKEDA, Yoshifumi SUZUKI, Masaaki ISAI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga_2O_3 has an oxygen detection characteristic at more than 900℃, so this material attracts much attention as an oxygen sensor at high temperature. The β-Ga_2O_3 films were prepared by the RF magnetron sputtering method. On two kinds of substrates namely Si (100) and quartz to compare the influence on the oxygen detection characteristics. As a result, it was found that the oxygen gas sensor fabricated on a quartz substrate had superior oxygen detection characteristics. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing (RTA) / Oxygen sensor |
Paper # | ED2011-27,CPM2011-34,SDM2011-40 |
Date of Issue |
Conference Information | |
Committee | ED |
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Conference Date | 2011/5/12(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Preparation and evaluation of Ga_2O_3 oxygen sensors |
Sub Title (in English) | |
Keyword(1) | Gallium oxide |
Keyword(2) | Metal oxides |
Keyword(3) | Magnetron sputtering method |
Keyword(4) | Rapid thermal annealing (RTA) |
Keyword(5) | Oxygen sensor |
1st Author's Name | Takahiro YAMAMOTO |
1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
2nd Author's Name | Shinya KAYANO |
2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
3rd Author's Name | Hiroki IKEDA |
3rd Author's Affiliation | Faculty of Engineering, Shizuoka University |
4th Author's Name | Yoshifumi SUZUKI |
4th Author's Affiliation | Faculty of Engineering, Shizuoka University |
5th Author's Name | Masaaki ISAI |
5th Author's Affiliation | Faculty of Engineering, Shizuoka University |
Date | 2011-05-20 |
Paper # | ED2011-27,CPM2011-34,SDM2011-40 |
Volume (vol) | vol.111 |
Number (no) | 44 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |