| Presentation | 2011-05-19 High-quality AlN/GaN distributed Bragg reflectors grown on AlN templates Kouta YAGI, Mitsuru KAGA, Kouji YAMASHITA, Kenichirou TAKEDA, Motoaki IWAYA, Tetsuya TAKEUCHI, Satoshi KAMIYAMA, Isamu AKASAKI, Hiroshi AMANO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | AlN/GaN multilayer structure have relatively large refractive index differences in the group-III nitride semiconductors, which are expected to obtain high reflectivity distributed Bragg reflectors (DBRs) with a relatively small number of pairs. On the other hand, due to the cracks caused by the lattice mismatch, it is difficult to fabricate DBRs having high reflectivities in a large area. In this paper, we fabricated AlN/GaN DBRs on AlN templates for the first time in order to suppress the cracks by minimizing the tensile strain in the DBR layers. A high reflectivity of 97.5% was achieved in the 30 pair AlN/GaN DBR on AlN template. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Distributed Bragg Reflector / crack / AlN / Reflectance |
| Paper # | ED2011-18,CPM2011-25,SDM2011-31 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2011/5/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High-quality AlN/GaN distributed Bragg reflectors grown on AlN templates |
| Sub Title (in English) | |
| Keyword(1) | Distributed Bragg Reflector |
| Keyword(2) | crack |
| Keyword(3) | AlN |
| Keyword(4) | Reflectance |
| 1st Author's Name | Kouta YAGI |
| 1st Author's Affiliation | Fac. Sci. & Eng., Meijo University() |
| 2nd Author's Name | Mitsuru KAGA |
| 2nd Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 3rd Author's Name | Kouji YAMASHITA |
| 3rd Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 4th Author's Name | Kenichirou TAKEDA |
| 4th Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 5th Author's Name | Motoaki IWAYA |
| 5th Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 6th Author's Name | Tetsuya TAKEUCHI |
| 6th Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 7th Author's Name | Satoshi KAMIYAMA |
| 7th Author's Affiliation | Fac. Sci. & Eng., Meijo University |
| 8th Author's Name | Isamu AKASAKI |
| 8th Author's Affiliation | Fac. Sci. & Eng., Meijo University:Akasaki Research Center, Nagoya University |
| 9th Author's Name | Hiroshi AMANO |
| 9th Author's Affiliation | Grad. Sch. of Eng., Nagoya University:Akasaki Research Center, Nagoya University |
| Date | 2011-05-19 |
| Paper # | ED2011-18,CPM2011-25,SDM2011-31 |
| Volume (vol) | vol.111 |
| Number (no) | 44 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |